Carl Zeiss Meditec Ag

Christian Deutsch

Martin Hacker

Gerard Antkowiak

The claimed embodiments relate to methods for characterizing a laser beam () of a laser processing system (). The method includes a) providing an aperture arrangement () with a plurality of apertures () in a work plane () of the laser processing system () such that the apertures () extend within the work plane (). The method also includes b) scanning the laser beam () along a scanning direction () parallel to the work plane () across the aperture arrangement () in such a way that the laser beam () at least partially sweeps over the apertures (). The method also includes c) determining a respective energy of the laser beam () transmitted through the apertures () during the scanning process, and d) determining an extent of the laser beam () along the scanning direction () using the determined energy of the laser beam () transmitted through a first aperture () of the plurality of apertures () and determining an energy parameter of the laser beam () on the basis of the determined energy of the laser beam () transmitted through a second aperture () of the plurality of apertures (). In this case, the first aperture () has a predetermined extent along the scanning direction (), which is smaller than the mean diameter of the laser beam () in the work plane (). In addition, a second aperture () has an extent that is larger than the laser beam () in the work plane () and is designed to transmit the laser beam () essentially completely.

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Weimar, Germany

Christian Deutsch