Lam Research Corporation

Christian David Frederickson

Herbert Elliot Litvak

Eugene Yuexing Zhao

Kang Jia

Michael David Steiman

An optical window structure is disclosed. The optical window structure includes a support layer that has a reinforcement layer and a cushioning layer. In addition, the optical windows structure has a polishing pad which is attached to a top surface of the support layer. Furthermore, the optical window structure has an optical window opening and a shaped optical window. The shaped optical window at least partially protrudes into the optical window opening in the support layer and the polishing pad during operation.

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Pleasanton, CA, United States of America

Christian David Frederickson