Siemens Aktiengesellschaft

Paul Scherrer Institut

Eulitha A.g.

Christian David

Franz Pfeiffer

Stefan Popescu

Eckhard Hempel

Martin Hoheisel

Thomas Mertelmeier

Joachim W Baumann

Manfred Schuster

Martin Engelhardt

Jörg Freudenberger

Tilman Donath

Björn Heismann

Harun Solak

Marco Stampanoni

Matthias Honal

Timm Weitkamp

Barbara Matthis

Vitaliy Guzenko

Stefan Prof Popescu

Franz Dr Prof Pfeiffer

Franz Prof Pfeiffer

A method for manufacturing a low-angle blazed grating on a semiconductor or silicon substrate, includes spin-coating the substrate with resist layer or hydrogen or polysilsesquioxane, being 100-1000 nm or few hundred nanometers thick, applying grayscale irradiation lithography exposure to the resist layer, generating a dose modulated pattern therein, varying in response to absorbed energy density from irradiation lithography exposure. The coated, irradiated substrate is developed in solution, such as TMAH or NaOH, enabling a blazed profile having structures of thickness-dependent diffusion barriers or SiO, with 0-1000 nm height to emerge. Thermal oxidation in oxygen atmosphere at elevated temperature with the developed substrate, converts the upper silicon substrate layer into SiOto a depth depending on the thickness of the pattern in the resist layer above. Hydrofluoric acid fluid removes the SiO, creating low-angle low-roughness blazed grating structure on silicon substrate.

Fabrication of blazed diffractive optics by through-mask oxidation

An X-ray arrangement is suitable to record absorption, phase contrast, and dark field images of an object. The visibility of low absorbing specimens is improved and required radiation dose is reduced. The assembly includes an X-ray source; two or more gratings; a position-sensitive detector with spatially modulated detection sensitivity; a recorder for recording the images; an evaluator for evaluating the intensities for each pixel to identify the characteristic of the object for each individual pixel as an absorption and/or a differential phase contrast and/or an x-ray scattering dominated pixel. Images are collected by rotating from 0 to n or 2n either the sample or the assembly. The gratings are produced with planar geometry. The X-rays pass through the gratings parallel to the substrate. The grating structures extend along the X-ray path which determines the phase shift. The attenuation of the X-rays caused by the grating structures is no longer given by the thickness, but by the length of the grating structures.

Method for X-ray phase contrast and dark-field imaging using an arrangement of gratings in planar geometry

An arrangement and a method are disclosed for projective and/or tomographic phase-contrast imaging using X-ray radiation. In at least one embodiment, one or more phase grids is/are arranged in the beam path such that during a rotation of the at least one X-ray source, the examination object is scanned with different spatial orientations of the grid lines relative to the examination object such that the complete refraction angle, and hence the complete phase shift gradient, can be determined for each X-ray beam from the two scans with differently oriented phase grids in order to be able to show the phase shift of an examination object in terms of projections or in a tomographic image.

Arrangement and method for projective and/or tomographic phase-contrast imaging using X-ray radiation

In a method for the production of x-ray-optical gratings composed of a first material forming of periodically arranged grating webs and grating openings, a second material is applied by electroplating to fill the grid openings. The electroplating is continued until a cohesive layer of the second material with uniform height is created over the grating webs with this layer having a large absorption coefficient, the absorption properties of the grating structure of the grating are homogenized, so an improvement of the measurement signals that are generated with this grating is improved. Moreover, the mechanical stability of gratings produced in such a manner is improved.

X-ray optical grating and method for the production thereof, and X-ray detector embodying same

An interferometer for x-rays, in particular hard x-rays, for obtaining quantitative x-ray images from an object, includes: a) an x-ray source, preferably a standard polychromatic x-ray source, b) a diffractive beam splitter grating other than a Bragg crystal, preferably in transmission geometry, c) a position-sensitive detector with spatially modulated detection sensitivity having a number of individual pixels; d) means for recording the images of the detector in a phase-stepping approach; and e) means for evaluating the intensities for each pixel in a series of images in order to identify the characteristic of the object for each individual pixel as an absorption dominated pixel and/or an differential phase contrast dominated pixel and/or an x-ray scattering dominated pixel.

X-ray interferometer for phase contrast imaging

An x-ray CT system that generates tomographic phase contrast or dark field exposures, has at least one grating interferometer with three grating structures arranged in series in the radiation direction, with a modular design of the second and third grating structures. The distance between the first grating structure of the x-ray source and the second grating structure (fashioned as a phase grating) of the respective grating/detector modules is adapted, depending on the fan angle, corresponding to a period of the grating structure of the x-ray source projected onto the grating detector module at a respective fan angle (&#x3c6;).

X-ray CT system to generate tomographic phase contrast or dark field exposures

An x-ray CT system for x-ray phase contrast and/or x-ray dark field imaging has a grating interferometer that has a first grating structure that has a number of band-shaped x-ray emission maxima and minima arranged in parallel, the maxima and minima exhibiting a first grating period, a second band-shaped grating structure that produces, as a phase grating, a partial phase offset of x-ray radiation passing therethrough and that exhibits a second grating period, a third band-shaped grating structure with a third grating period with which relative phase shifts of adjacent x-rays and/or their scatter components are detected, and a device for value-based determination of the phase between adjacent x-rays and/or for value-based determination of the spatial intensity curve per detector element perpendicular to the bands of the grating structures. The third grating structure has a grating period that is larger by a factor of 2 to 5 than the grating period of the first grating structure.

X-ray CT system for x-ray phase contrast and/or x-ray dark field imaging

An interferometer for X-rays, in particular hard X-rays, for obtaining quantitative phase contrast images, includes a standard polychromatic X-ray source, a diffractive optical beam splitter other than a Bragg crystal in transmission geometry, and a position-sensitive detector with spatially modulated detection sensitivity.

Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source

The present invention is directed to a method for the generation of periodic curved structures in a basic support material such as the basic layer for the magnetic bit cells of a magnetic storage device. The method includes the steps of generating a number of diffraction masks such that each mask comprises at least one transmission diffraction gratings having at least one of a different periodic concentric circular pattern, spiral-like periodic pattern and periodic radial spoke pattern; positioning at least one of the diffraction masks simultaneously or successively in a certain distance of the basic support material to be patterned, the distance being mask dependent; exposing the basic support material by directing light beams through each of the diffraction masks; and interfering the different light beams diffracted by the gratings on each mask in order to generate coincident light intensity patterns on the surface of the basic support material.

Method for generating a circular periodic structure on a basic support material

In a focus detector arrangement and method for an x-ray apparatus for generating projection or tomographic phase-contrast images of an examination subject, a beam of coherent x-rays is generated by an anode that has areas of different radiation emission characteristics arranged in bands thereon, that proceed parallel to grid lines of a phase grid that is used to generate the phase-contrast images.

Focus detector arrangement and method for generating contrast x-ray images

A method and a measurement system are disclosed for the noninvasive determination of properties of an object to be examined and to the use of a contrast medium for X-ray phase-contrast measurement. in at least one embodiment of the invention, a mixture (suspension) consisting of a base liquid and a multiplicity of particles contained therein is used, the refractive index of the base liquid being different to the refractive index of the particles.

Measurement system and method for the noninvasive determination of properties of an object to be examined and contrast medium X-ray phase-contrast measurement

An X-ray optical transmission grating of a focus-detector arrangement of an X-ray apparatus is disclosed, for generating projective or tomographic phase contrast recordings of a subject. In at least one embodiment, the grating includes a multiplicity of grating bars and grating gaps arranged periodically on at least one surface of at least one wafer, wherein the X-ray optical transmission grating includes at least two sub-gratings arranged in direct succession in the beam direction.

X-ray optical transmission grating of a focus-detector arrangement of an X-ray apparatus for generating projective or tomographic phase contrast recordings of a subject

A focus-detector arrangement of an X-ray apparatus is disclosed for generating projective or tomographic phase contrast recordings with a phase grating. According to at least one embodiment of the invention, in the gaps between its bars, the phase grating includes a filler material whose linear attenuation coefficient in the relevant energy range is greater than that of the bars. The height of the filler material in the gaps is dimensioned on the one hand so that the X-radiation with the energy used for measuring the phase shift generates a phase shift in the X-radiation such that, after the phase grating, the rays which pass through the bars are phase shifted by one half wavelength relative to the rays which pass through the gaps with the filler material. Further, the height of the filler material in the gaps on the other hand is dimensioned so that the attenuation of the X-radiation, at least in relation to the energy used for measuring the phase shift, is the same when passing through the bars and when passing through the filler material.

Focus-detector arrangement for generating projective or tomographic phase contrast recordings with X-ray optical gratings

A focus/detector system of an X-ray apparatus and a method for generating projective or tomographic phase contrast recordings, are disclosed. In an embodiment of the system, the system includes a beam source equipped with a focus and a focus-side source grating, arranged in the beam path and generates a field of ray-wise coherent X-rays, a grating/detector arrangement having a phase grating and grating lines arranged parallel to the source grating for generating an interference pattern, and a detector having a multiplicity of detector elements arranged flat for measuring the position-dependent radiation intensity behind the phase grating. Finally, the detector elements are formed by a multiplicity of elongate scintillation strips, which are aligned parallel to the grating lines of the phase grating and have a small period, whose integer multiple corresponds to the average large period of the interference pattern which is formed by the phase grating.

Focus/detector system of an x-ray apparatus for generating phase contrast recordings

A focus-detector arrangement includes a radiation source with a focus, arranged on a first side of the subject, for generating a fan-shaped or conical beam of rays; at least one X-ray optical grating arranged in the beam path, with at least one phase grating arranged on the opposite second side of the subject in the beam path generating an interference pattern of the X-radiation preferably, in a particular energy range; and an analysis-detector system which detects at least the interference pattern generated by the phase grating in respect of its phase shift with position resolution. According to at least one embodiment of the invention, at least one X-ray optical grating including bars which are free from overhangs form shadows in the beam path of the fan-shaped or conical beam of rays.

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Lauchringen, Germany

Christian David