Leybold Vakuum Gmbh

Oerlikon Leybold Vacuum Gmbh

Applied Materials, Inc.

Leybold Gmbh

Leybold Vacuum Gmbh

Christian Beyer

Josef Hodapp

Ralf Adamietz

Markus Henry

Heinrich Engl&auml;nder

Hermann Boy

Heinrich Engländer

Rainer Hölzer

G&uuml;nter Sch&uuml;tz

Heinz Englaender

Gerhard Wilhelm Walter

Dieter Haas

Jayesh S Patel

Dennis R Smith

Karl-Heinz Ronthaler

Gunter Schutz

Michael Froitzheim

Heinz Frings

Hans-Rudolf Fischer

Peter Klingner

Heinz-Dieter Odendahl

Robert Stolle

Keith Trenton

Mariusch Gregor

Alois Greven

Rudolph Bahnen

Anja Plugge

Guenter Holstein

Dieter G&ouml;tz

Martin Laerbusch

Heinz Engländer

Jürgen Brezina

Gunter Holstein

Christian Harig

Robert Schneiders

Heinz Odenthal

Günter Schütz

Sascha Werker

Uwe Zöllig

Olaf Stahlschmidt

Karl-Heinrich Völker

A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.

Leak detection device and method for checking objects for fluid tightness by means of a leak detection device

A multi-inlet vacuum pump has a first pump device () and a second pump device (). The first pump device () includes a first rotor element () having a plurality of first rotor discs () arranged consecutively in the delivery direction (). The second rotor disc includes a second rotor element () having a plurality of second rotor discs () arranged consecutively in the delivery direction (). A first fluid flow () is suctioned through a main inlet () by the first pump device () and delivered in the direction of the second pump device (). A second fluid flow () is suctioned through an intermediate inlet () by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc () of the first pump () substantially corresponds to the diameter of the first rotor () of the second pump device ().

Multi-inlet vacuum pump

A multi-inlet vacuum pump includes a first pump device () including a first rotor element () with a plurality of first rotor disks () serially arranged in the conveying direction (), and a second pump device () including a further rotor element () with a plurality of second rotor disks () serially arranged in the conveying direction (). A diameter of the second rotor disks () is at least partially larger than a diameter of the first rotor disks (). A main inlet () sucks in a first fluid stream () with the first pump device (). The first fluid stream () is conveyed in the direction of the further pump device (). An intermediate inlet () sucks in a second fluid stream () with the second pump device (). The second fluid stream () is conveyed in the direction of a pump outlet. A process of merging the two fluid streams () will occur within the second pump device (), preferably between two adjacent second rotor disks () of the second pump device ().

The invention refers to a mass spectrometer arrangement () comprising a housing () having a mass spectrometer forevacuum vacuum chamber () with a mass spectrometer forevacuum outlet (), at least two mass spectrometer high-vacuum vacuum chambers (), and an integrated turbomolecular pump () connected with the high-vacuum vacuum chambers () and having a forevacuum outlet (). The two forevacuum outlets () open into a common forevacuum chamber () in the housing (), which in turn opens into a housing outlet ().

Mass spectrometer arrangement

A vacuum pump () includes a pump unit () and an operating unit () arranged spaced from the pump unit (). The operating unit () is connected with the pump unit () for controlling it. The pump unit () and the operating unit () respectively comprise a transceiver module () for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit () and the operating unit () are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.

Vacuum pump

A test-gas leak detector () includes a connection () for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (), a test-gas detector () that is connected on the intake side of said pumps, and a test-gas conduit () leading from the connection of the leak detector (). The conduit is connected to at least one intermediate stage of the high-vacuum pump () in addition to the pre-vacuum zone of the high-vacuum pump () via conduit sections () and valves (). A housing (), in which at least some of the conduits and valves and the high-vacuum pump () are integrated, forms part of the leak detector () and a detachable slide-in module () forms part of the high-vacuum pump. The slide-in module has an external jacket construction () comprising passages () and when the leak detector () is operational, is situated in a receiving opening () that is provided in the housing ().

Test-gas leak detector

A vacuum pump () includes a control device () for processing operational data and operational instructions. Further, the vacuum pump () includes a touch screen () serving as display for displaying the operational data callable from the control device () and as input for inputting operational instructions into the control device (). The touch screen () includes a display panel () and a key panel () as display and the input, respectively, and is connected with the control device () via a data line (). By combining the display and the input in a single device, namely the touch screen, the trouble for display and data input is reduced.

The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion () comprises a magnetic coil () generating a magnetic field and having a yoke (). The second bearing portion () comprising a permanent magnet () which is magnetized in alignment with the yoke (). The permanent magnet of the second bearing portion has an attracting effect upon the yoke of the first bearing portion. To avoid this, the first bearing portion is provided with a permanently magnetized compensation magnet () which is located opposite the permanent magnet () of the second bearing portion () and is magnetized oppositely to the permanent magnet ().

Magnetic bearing

A turbomolecular vacuum pump () has an inlet () and an outlet () and rotor and stator vanes (and), situated between the inlet and outlet. The rotor vanes () have front sides () and rear sides () in relation to the direction of rotation. At least a part of the rotor vanes () have a rear side () which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes () have a front side (), which is concave on the suction side and convex on the delivery side.

Turbomolecular vacuum pump with the rotor and stator vanes

A rotor () is mounted in a stator () with radial magnetic bearings () and with an axial magnetic bearing () in a contactless manner. The axial magnetic bearing () produces an axial magnetic field with a magnet coil () and a yoke iron () mounted on the stator (). An axially magnetized permanent magnet () is provided on the rotor (), located approxaimately axially opposite the yoke iron (). A permanently axially magnetized compensating magnet () is provided on the stator () and arranged axially opposite the permanent magnet of the rotor () and polarized in the opposite direction, such that the permanent magnet () of the rotor and the compensating magnet () repel each other. In a center position, the rotor is bias-free by compensating the forces of attraction between the permanent magnet of the rotor and the yoke iron. As a result, the center position of the rotor can be adjusted with relatively small magnet coil flows. This results in small magnet coils, produces less heat and reduces the required power of the axial bearing.

A vacuum line () comprising a vacuum-tight flexible tube section () and a vibration damper () axially parallel to the flexible tube section () serves to connect tow vacuum devices (). The vibration damper () is an actively regulated axial magnetic bearing. Thereby, a vibration damper with good dampening properties is realized. By changing the regulation parameters, the vibration damper is adaptable and not subjected to any mechanical wear. The transmission of structure-borne noise is avoided by the contactless vibration dampening.

Vacuum conduit

A magnetic bearing for rapidly rotating machines ( ), in particular, for turbo compressors, drag vacuum pumps, or similar, includes two bearings ( ), each with a stator magnetic-ring set ( ) and a rotor magnetic-ring set ( ). Movement of the rotor is damped by magnetic-ring sets ( ) arranged concentrically to each other. The stator magnetic-ring set ( or ) is arranged externally and the rotor magnetic-ring set ( or ) is arranged internally. Non-magnetic elements with good electrical conducting properties ( ) are connected to the outer circumference surfaces of at least one part of the magnetic ring of each of the stator-side magnetic-ring sets ( ).

Magnetic bearing with damping

A vacuum pump ( ) includes a housing ( ) in which a suction inlet opening ( ) is defined. A vibration absorber ( ) includes a suspension body ( ) and an absorber jacket ( ). The housing ( ) of the vacuum pump ( ) is connected directly to one end of the suspension body ( ) in vacuum-tight connection and an opposite end of the suspension body carries a connecting port ( ). By connecting the suspension body directly with the housing without mechanically releasable interconnection elements, the overall height of the pump and suspension body assembly is reduced.

Vacuum pump with vibration absorber

A friction pump ( ), such as turbomolecular pump, includes a steel housing ( ) in which a steel shaft ( ) is supported by a bearing ( ). A rotor ( ) with a central bore ( ) is mounted on the shaft. In order to reduce the risk of the joint area between the rotor and the shaft becoming loose, a ring groove ( ) which encompasses the joint area between the rotor is provided in an area adjacent at least one of the faces of the rotor. A reinforcing ring ( ) of a high strength, low thermal expansion material encompasses one of a thrust member ( ) and cylindrical rotor sections ( ) adjacent the shaft.

Rotor fixture for a friction vacuum pump

A friction vacuum pump ( ) with a frame ( ), stator ( ), rotor ( ) and housing; all functional elements of the pump are combined into one unit ( ), which, in turn, can be inserted into a housing ( ) that has been adapted to a specific application; using this procedure, all separate connection housing can be eliminated and optimal conductance can be achieved (FIG. 1).

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Kö'ln, Germany

Christian Beyer