Asml Netherlands B.v.

Mapper Lithography IP B.v.

Christiaan Otten

Xuedong Liu

Xuerang Hu

Alexander Hendrik Vincent Van Veen

Yang-Shan Huang

Johan Joost Koning

Remco Jager

Willem Henk Urbanus

Johannes Petrus Sprengers

Marc Smits

Johannes Cornelis Jacobus De Langen

Qingpo Xi

Xinan Luo

Stijn Wilem Herman Karel Steenbrink

Laura Del Tin

Johan Frederik Cornelis Van Gurp

Arjen Benjamin Storm

Aaron Yang-Fay Ayal

Christiaan Ruben Van Den Berg

Michiel Matthieu Bruinink

Laura Dinu Gurtler

Peter-Paul Crans

Christan Teunissen

Stijn Willem Herman Karel Steenbrink

Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.

Stack alignment techniques

Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.

Replaceable module for a charged particle apparatus

Feedthrough device (), for forming a hermetic seal around signal conductors in a signal conductor group () with a group width. The device comprises a slotted member () and a base (). The base defines a through hole () that extends entirely through thebase along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces () on opposite sides associated with the feedthrough direction, and a side surface () facing transverse to the feedthrough direction. The slotted member comprises a slot (), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces andinto a longitudinal opening () along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.

Feedthrough device and signal conductor path arrangement

Feedthrough device (), for forming a hermetic seal around signal conductors in a signal conductor group () with a group width. The device comprises a slotted member () and a base (). The base defines a through hole () that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces () on opposite sides associated with the feedthrough direction, and a side surface () facing transverse to the feedthrough direction. The slotted member comprises a slot (), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening () along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.

Fiber feedthrough device (), for forming a hermetic seal around optical fibers in a flat fiber group () with a group width. The device comprises a slotted member and a base (). The base defines a hole () that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member () defines first and second surfaces () on opposite sides associated with the feedthrough direction, and a side surface () facing transverse to the feedthrough direction. The slotted member comprises a slot (), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening () along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the fiber group width.

Optical fiber feedthrough device and fiber path arrangement

Growing community of inventors

Ijsselstein, Netherlands

Christiaan Otten