Commissariat a L'energie Atomique Et Aux Energies Alternatives

Commissariat a L'energie Atomique

Centre National De La Recherche Scientifique

Université Joseph Fourier

Institut National Polytechnique De Grenoble

Christel Dieppedale

Laurent Mollard

Stéphane Fanget

Daivid Fowler

Laurent Frey

Henri Sibuet

Gwenael Le Rhun

Jean Hue

Thierry Hilt

Bruno Reig

Stephan Borel

Olivier Girard

David Henry

Jerome Delamare

Gerard Barrois

Gwenaël Le Rhun

Sylvain Pelloquin

Henry Sibuet

Jerome Meunier-Carus

Thierry Terrier

Optical scanner

A scanner provided with a plurality of elementary scanners, especially two elementary scanners, referred to as a first and second scanner respectively. In particular, the first scanner and the second scanner are arranged to scan, each with an optical beam, respectively, a first surface and a second surface included in the first surface and of a smaller extent than the latter.

A reflector device reflects luminous radiation of wavelength λ. The device is provided with a supporting base whereon are assembled a partially transparent mirror having a partially reflective front face and luminous radiation scattering and/or absorption structure to scatter and/or absorb luminous radiation liable to be transmitted by a rear face, opposite the front face.

Reflective device

The present invention relates to a scanner provided with a vibratory beam on or in which is formed a phased array intended to extract according to either one of two parallel faces of the beam a light radiation that could be emitted by a light source.

A mechanical microsystem including a pair of elastically deformable elements, a mechanical hinge joining the deformable elements together, and at least two electroactive layers. The microsystem is configured such that, from a rest position wherein the deformable elements fall into a plane, a deformation of one of the deformable elements displacing it outside of the plane induces an electric current circulation in one of the two electroactive layers, and/or conversely. Each deformable element has a front face and a rear face opposite one another and substantially parallel to the plane. A first electroactive layer is arranged together with a first deformable element on its rear face, and a second electroactive layer, different from the first layer, is arranged with a second deformable element, different from the first element, on its front face.

Mechanical microsystem and associated manufacturing method

A scanner is provided with a plurality of elementary scanners each able to scan a different surface by means of a light beam. Each elementary scanner comprises a beam, for example a vibrating beam, on or in which a phase-controlled array is formed, intended to extract, at a face of the beam, a light beam able to be emitted by a light source. At least one beam of one of the elementary scanners, referred to as the first scanner, has, at rest, a deflection different from that of the beams of the other elementary scanners. This arrangement enables the first scanner to scan a surface, referred to the first surface, different from that scanned by the other elementary scanners. The optical scanner according to the present invention makes it possible to cover a relatively large surface while keeping appreciable compactness.

The invention relates to a method for transferring at least one layer of material, comprising: producing first and second separating layers (), one against the other, on a first substrate (); producing the layer to be transferred on the second separating layer (); securing the layer to be transferred to a second substrate (), forming a stack of different materials; and performing mechanical separation at the interface between the separating layers; in which the materials of the stack are such that the interface between the first and second separating layers has the weakest adhesion force, and the method comprises a step reducing an initial adhesion force of the interface between the first and second separating layers.

Method for transferring at least one layer of material from a first substrate to a second substrate

A method for producing a metal-insulator-metal (MIM) type structure is provided, including producing, on a first substrate, first and second separation layers arranged one against the other; producing, on the second separation layer, an insulator layer including a perovskite structure material; producing a first gold and/or copper layer on the insulator layer, forming at least one part of a first electrode; making the first gold and/or copper layer integral with a second substrate; and forming a mechanical separation at an interface between the first and the second separation layers, the first separation layer remaining integral with the first substrate and the second separation layer remaining integral with the insulator layer, the insulator layer being arranged between the first electrode and a second electrode including at least one metal layer.

Metal-insulator metal structure and method of forming the same

A method and an electrical device with superimposed layers in an alternation of conductive layers and insulating layers. A mesa-type structure is formed, leaving for at least one conductive layer, an uncovered peripheral portion accessible for connection. In this portion, an electrically insulating pattern is configured in order to mark out an electrically insulated area located in the peripheral portion of said at least one of the electrically conductive layers. Application to electrical capacitances and redistribution layers for microelectronic devices.

Multilayer electrical device

The fabrication of a semiconductor fixed structure defining a volume, for example of a MEMS micro electro-mechanical system includes, determining thicknesses beforehand depending on the functional distances associated with elements. At least one element is formed on a substrate by thermal oxidation of the substrate so as to form an oxide layer followed by selective etching of the oxide layer so as to define the volume in an etched portion by baring the underlying substrate so as to define the element in an unetched portion, and later oxidation of the substrate so as to form an oxide layer, in order to obtain the elements at the functional distances.

Method for fabricating a fixed structure defining a volume receiving a movable element in particular of a MEMS

The actuation microsystem is produced on a flat substrate and comprises a pivoting arm mounted in rotation around a hinge, a stationary contact pad arranged on the substrate, and an end of opening travel stop of the pivoting arm. The end of travel stop comprises a top part, for example a head, arranged above and at a distance from the pivoting arm between an articulation end and a free end of the pivoting arm. The stop comprises a bottom part arranged laterally with respect to the pivoting arm, between the hinge and the stationary contact pad, and formed for example by a foot comprising a support pad formed on the substrate, a pedestal extending the support pad and a support portion of the head.

Actuation microsystem and method of producing same

This is a magnetic actuator including a mobile magnetic portion (), a fixed magnetic portion () provided with at least two attraction areas () for the mobile magnetic portion (), and means () for triggering the displacement of the mobile magnetic portion (), the mobile magnetic portion () being in levitation when it is not in contact with an attraction area (). The mobile magnetic portion () includes a magnet-based part () with reduced magnet weight, this part () having an overall volume, and a mass which is less than the one it would have if its overall volume was totally occupied by the magnet.

Levitation magnetic actuator

An electrolytic reactor including a conical recess of removable slices through which the electrolyte circulates towards a part to be coated under the action of a pump setting up forced circulation. The part is polarized to act as a cathode, facing a coaxial anode in the recess. This configuration leads to good electrolyte flow in front of the part, allowing accelerated deposit with a uniform thickness of the coating material, and dimensions of the chamber may be added.

Growing community of inventors

Crolles, France

Christel Dieppedale