Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (2 from 993 patents)
2 patents:
1. 10563298 - Wafer chuck with aerodynamic design for turbulence reduction
2. 9732416 - Wafer chuck with aerodynamic design for turbulence reduction