Imec

Katholieke Universiteit Leuven, Ku Leuven R&d

Interuniversitair Microelektronica Centrum (imec)

Stichting Imec Nederland

Interuniversitair Micorelektronica Centrum (imec, Vzw)

Imec Vzw

Katholieke Universiteit Leuven

Albert-ludwigs-universitat Freiburg

Chris Van Hoof

Eric Beyne

Gustaaf Regina Borghs

Paolo Fiorini

Ann Witvrouw

Patrick Ruther

Vladimir Leonov

Hans De Neve

Sherif Sedky

Kris A Baert

Robert Puers

Patrick Merken

Piet De Moor

Jan Fransaer

Anthony Muscat

Mehmet Akif Erismis

Jean-Pierre Celis

Junaid Aslam

Raquel Consuelo Hellin Rico

Arno Aarts

Hercules Pereira Neves

Raquel Consuelo HELLÍN Rico

Anthony Joseph Muscat

An active interface device including a transducer or sensor array having a plurality of transducers or sensors arranged to transform a cell activity into an electrical signal, at least one detection unit for detecting the electrical signal(s), at least one recording unit for recording the electrical signal(s), comprising a plurality of recording channels arranged for being routed to the transducers or sensors, and at least one control unit. The control unit is arranged for addressing the transducers or sensors to the detection unit(s), for activating transducers or sensors, and for routing the recording channels to activated transducers or sensors.

Active interface device

The current invention provides a stepping actuator, achieving large range up to &#xb1;35 &#x3bc;m with low operating voltages of 15V or lower and large output forces of up to &#xb1;110 &#x3bc;N. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.

Low-voltage, large displacement stepping actuator and method for fabricating the same

A method for manufacturing thermopile carrier chips comprises forming first type thermocouple legs and second type thermocouple legs on a first surface of a substrate and afterwards removing part of the substrate form a second surface opposite to the first surface, thereby forming a carrier frame from the substrate and at least partially releasing the thermocouple legs from the substrate, wherein the thermocouple legs are attached between parts of the carrier frame. First type thermocouple legs and second type thermocouple legs may be formed on the same substrate or on a separate substrate. In the latter approach both types of thermocouple legs may be optimised independently. The thermocouple legs may be self-supporting or they may be supported by a thin membrane layer. After mounting the thermopile carrier chips in a thermopile unit or in a thermoelectric generator, the sides of the carrier frame to which no thermocouple legs are attached are removed. A thermoelectric generator according to the present disclosure may be used for generating electrical power, for example for powering an electrical device such as a watch. It may be used with a heat source and/or heat sink with high thermal resistance, such as a human body.

Method for manufacturing a thermopile on a membrane and a membrane-less thermopile, the thermopile thus obtained and a thermoelectric generator comprising such thermopiles

Manufacturing a semiconductor device involves forming () a sacrificial layer where a micro cavity is to be located, forming () a metal layer of thickness greater than 1 micron over the sacrificial layer, forming () a porous layer from the metal layer, the porous layer having pores of length greater than ten times their breadth, and having a breadth in the range 10 nm-500 nanometers. The pores can be created by anodising, electrodeposition or dealloying. Then the sacrificial layer can be removed () through the porous layer, to form the micro cavity, and pores can be sealed (). Encapsulating MEMS devices with a porous layer can reduce costs by avoiding using photolithography for shaping the access holes since the sacrificial layer is removed through the porous membrane.

Method for encapsulating a device in a microcavity

A thermoelectric generator (TEG) and a method of fabricating the TEG are described. The TEG is designed so that parasitic thermal resistance of air and height of legs of thermocouples forming a thermopile can be varied and optimized independently. The TEG includes a micromachined thermopile sandwiched in between a hot and a cold plate and at least one spacer in between the thermopile and the hot and/or cold plate. The TEG fabrication includes fabricating the thermopiles, a rim, and the cold plate.

Method of manufacturing a thermoelectric generator and thermoelectric generator thus obtained

Structures and methods are disclosed to produce mechanical strength in Micro Electro Mechanical Systems by increasing the moment of inertia of some of the composing elements. In one aspect, a thermal sensor with improved mechanical strength, thermal insulation and time constant is achieved. Moreover, the current method and apparatus is advantageous in terms of process time and process cost, particularly in the area of lithographic patterning.

Micro electro mechanical systems and devices

A device for emitting radiation at a predetermined wavelength is disclosed. The device has a cavity comprising a first bulk region and a second bulk region of opposite conductivity type wherein a barrier is provided for spatially separating the charge carriers of the first and the second region substantially at the antinode of the standing wave pattern of said cavity. The recombination of the charge carriers at the barrier create radiation, the emission wavelength of the radiation being determined by the cavity.

Device for emitting electromagnetic radiation at a predetermined wavelength and a method of producing such device

A device for emitting radiation it a predetermined wavelength is disclosed. The device has a cavity comprising a first bulk region and a second bulk region of opposite conductivity type wherein a barrier is provided for spatially separating the charge carriers of the first and the second region substantially at the antinode of the standing wave pattern of said cavity. The recombination of the charge carriers at the barrier create radiation, the emission wavelength of the radiation being determined by the cavity.

Device for emitting electromagnetic radiation at a predetermined wavelength

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Leuven, Belgium

Chris Van Hoof