Advanced Micro Devices Corporation

Chris L Wooten

Edward E Ehrichs

Travis D Kirsch

In a method for mounting an integrated circuit onto a substrate in a flip-chip configuration, a circuit alignment feature on the processed surface of the integrated circuit and a substrate alignment feature on the mounting surface of the substrate are used to accurately align a set of bonding pads on the processed surface of the integrated circuit with a corresponding set of contact pads on the mounting surface of the substrate. The positions of the circuit and substrate alignment features are determined, and a separation between these alignment features which will result in accurate alignment of the bonding pads to the corresponding contact pads is calculated. The circuit is moved with respect to the substrate in order to achieve this predetermined separation. The method may be carried out using an apparatus which includes a die placement fixture and a substrate placement fixture. An alignment feature detection system is used to determine positions of circuit and substrate alignment features, and an alignment controller coupled to the alignment feature detection system is adapted to move the circuit fixture with respect to the substrate fixture such that predetermined separation between the circuit and substrate alignment features is achieved.

Method and apparatus for accurate alignment of integrated circuit in flip-chip configuration

A semiconductor wafer review system and method. A method and system for front and back side review of semiconductor wafers is provided in various embodiments. Inspection data for the front side is used to position the wafer for front side review, and a wafer inverter is provided to flip the wafer for back side review. Inspection data for the back side is used to position the wafer for back side review.

Semiconductor wafer review system and method

A semiconductor wafer analysis system and method. In various embodiments, methods and systems are described for inspection and review of semiconductor wafers. Wafer inverters are provided, and inspection data is gathered for both the front and back sides of the wafers. The wafer inverters are also available at wafer review stations so that both the front and back sides of the wafers can be reviewed with a microscope.

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Austin, TX, United States of America

Chris L Wooten