Verity Instruments, Inc.

Chris D Pylant

John D Corless

Andrew Weeks Kueny

Timothy C Michals

The disclosure provides features for improved processing of optical data by identifying and characterizing stationary and transient signals in the electrical data representing the data collected from an optical sensor of an optical measurement system. In one example, an optical measurement system is disclosed that includes: (1) a pixel area of an optical sensor having multiple pixels that store an electrical charge corresponding to a received optical signal, (2) one or more reduced illumination regions that provide signal levels intrinsic to the optical sensor, and (3) one or more processors configured to adjust, during active operation of the system, digital representations of the electrical charges from the pixels of the pixel area using characterizations of the signal levels from the one or more reduced illumination regions.

System, apparatus, and method for improved background correction and calibration of optical devices

The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing can be used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.

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Carrollton, TX, United States of America

Chris D Pylant