Bruker Nano Gmbh

Chris Claypool

Emad S Zawaideh

Mazen Zawaideh

An imaging spectropolarimeter configured to examine targets with polarized light, in which orientation of light-polarizing components is judiciously chosen to be target-specific and which employ a three-camera optical detection system defining an optical detection axis with respect to which individual camera analyzers are oriented in a specifically-defined fashion. Programmable electronic circuitry is adapted to substantially simultaneously acquire polarimetric images of the target utilizing intensity information collected by the multi-pixel sensors of the optical detection system.

Imaging spectropolarimeter and sample characterization methodology utilizing the same

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

Spectroscopic ellipsometry system for thin film imaging

An imaging spectropolarimeter for examining targets with polarized light, the spectropolarimeter including a light source adapted to produce polarized light directed at a target. Embodiments also include a three-camera camera system defining a three-camera camera axis with a first camera unit comprising a first analyzer set at 0&#xb0;, a lens and a first multi-pixel sensor, a second camera unit comprising a second analyzer set at 45&#xb0;, a lens and a second multi-pixel sensor, and a third camera unit comprising a third analyzer set at 90&#xb0;, a lens and a third multi-pixel sensor. At least two beam splitters adapted to direct a portion of polarized light reflected from the target to each of the first, second and third camera units. Preferred systems include a processor adapted to produce polarimetric images of the target utilizing intensity information collected by the multi-pixel sensors.

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Carlsbad, CA, United States of America

Chris Claypool