Average Co-Inventor Count = 4.20
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (1 from 1,787 patents)
2. Mattson Technology, Inc (1 from 278 patents)
2 patents:
1. 6796697 - Illumination delivery system
2. 6717158 - Heating device for heating semiconductor wafers in thermal processing chambers