Average Co-Inventor Count = 1.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. The United States of America As Represented by the Director, National (1 from 10 patents)
2. Kla-tencor Technologies Corporation (641 patents)
1 patent:
1. 5363171 - Photolithography exposure tool and method for in situ photoresist