Canon Kabushiki Kaisha

Choshoku Sai

Shinji Uchida

Hirohito Ito

Katsumi Asada

Shigeo Sakino

Kotaro Akutsu

Kohei Imoto

An optical device includes a mirror, and a plurality of actuators configured to deform a shape of a reflecting surface of the mirror. At least some of the plurality of actuators are arranged on a plurality of concentric circles arranged in such a manner that the concentric circles are arranged denser as positions of the concentric circles are located farther from a center of the reflecting surface of the mirror, and at least some of the plurality of actuators are arranged at equal intervals in circumferential directions of the concentric circles.

Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article

The present invention provides an optical apparatus for deforming a reflecting surface of a mirror, comprising a base plate, a plurality of first actuators each configured to apply a force to the surface opposite to the reflecting surface, a plurality of second actuators each having rigidity lower than that of the first actuator, and configured to apply a force to the surface opposite to the reflecting surface, a sensor configured to detect information indicating a driving status of each of the plurality of first actuators, and a control unit configured to control, based on an output of the sensor, driving of each of the plurality of first actuators and driving of each of the plurality of second actuators so that a shape of the reflecting surface is changed to a target shape.

Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article

A mirror unit includes: a mirror; a plurality of non-contact type actuators including movable elements and stators, and configured to change a shape of the mirror; a supporting plate to which the stators are fixed; and a structure configured to hold the mirror and the supporting plate. The movable elements are attached to a surface of the mirror that is opposite to an optical surface, and the structure holds the supporting plate via a kinematic mount.

Mirror unit and exposure apparatus

The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a fixing member configured to fix a part of the mirror including a center of the mirror to the base plate, and a plurality of actuators each having a first end connected to the mirror and a second end connected to the base plate, and configured to apply force to a back face of the mirror, wherein the plurality of actuators include a plurality of first actuators and a plurality of second actuators, and the plurality of first actuators are arranged such that a distance between each first actuator and the center of the mirror is longer than half of a distance between the center and a periphery of the mirror.

An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.

Optical unit and exposure apparatus having the same

A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.

Reflecting mirror and exposure apparatus using the same

At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.

Optical element holding apparatus, exposure apparatus and device manufacturing method

A hydrostatic bearing apparatus has a hydrostatic bearing pad, a labyrinth seal part having an exhaust groove provided around the outside of the hydrostatic bearing pad, an adjustment mechanism for adjusting a labyrinth seal part gap, non-contacting displacement gauges for sensing changes in the size of the gap, and actuators that are activated to adjust the gap so as to maintain the gap at a predetermined constant value. The exhaust groove parts and the labyrinth seal part can move relative to each other, and an annular seal forms an airtight seal to prevent air leaks and keep the bearing steady.

Hydrostatic bearing and stage apparatus using same

An apparatus includes a static gas bearing provided upon a first object and configured to form a gas layer between the first object and a second object by use of gas supplied thereto, and to support the first object movably relative to the second object, a plurality of exhaust grooves provided upon the first object and configured to surround the static gas bearing, and a plurality of exhaust flowpassages provided through the first object, connecting to a respective one of the plurality of exhaust grooves, and configured to exhaust gas from a respective one of the plurality of exhaust grooves. An outermost exhaust flowpassage of the plurality of exhaust flowpassages connected to an outermost exhaust groove, which is outermost of one of the plurality of exhaust grooves with respect to the static gas bearing, is shorter than an innermost exhaust flowpassage of the plurality of exhaust flowpassages connected to an innermost exhaust groove, which is innermost one of the plurality of exhaust grooves with respect to the static gas bearing, so that a conductance of the outermost exhaust flowpassage is greater than that of the innermost exhaust flowpassage.

Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method

A weight compensation apparatus for compensating for a weight of a stage that is movable along a vertical reference plane including a pulley having a pulley shaft, a belt which is wound around and supported by the pulley, and has the stage at one end and a counter mass corresponding to the stage at the other end, and a hydrostatic bearing which has an arcuated bearing portion, and supports the pulley shaft by causing a fluid to flow into a bearing gap between the bearing portion and the pulley shaft.

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Utsunomiya, Japan

Choshoku Sai