Asm Assembly Automation Limited

Chor Fai Wong

Gary Peter Widdowson

Wai Chuen Gan

Cheuk Wah Tang

A system for maintaining thermal stability of a motion stage driven by a motor comprises a motion current generator operative to produce a motion current to drive the motion stage to move and a thermal current generator operative to produce a thermal current to dissipate heat in the motion stage for controlling a temperature of the motion stage without producing corresponding movement of the motion stage. A summation controller is operative to combine the motion current with the thermal current, and to produce a combined current output to the motor.

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Hong Kong, China

Chor Fai Wong