Samsung Electronics Co., Ltd.

Choongryul Ryou

Victor Chan

Manfred Eller

Srikanth Balaji Samavedam

Jun Yuan

Nam Sung Kim

Seunghwan Lee

Narasimhulu Kanike

Generating an embedded resistor in a semiconductor device includes forming a shallow trench isolation (STI) region in a substrate; forming a pad oxide on the STI region and substrate; depositing a silicon layer on the pad oxide; forming a photo-resist mask on a portion of the silicon layer disposed above the STI region; etching the silicon layer to yield a polyconductor above the STI region; oxidizing the polyconductor; depositing an oxide material or a metal gate material on the oxidized surface; depositing a silicon layer on the oxide material or metal gate material; depositing additional silicon on a portion of the silicon layer above the STI region; patterning a transistor gate with a photo-resist mask on another portion of the silicon layer away from the STI region; and etching the silicon layer to yield a transistor structure away from the STI region and a resistor structure above the STI region.

Semiconductor embedded resistor generation

Growing community of inventors

Seongnam-si, South Korea

Choongryul Ryou