Chartered Semiconductor Manufacturing Ltd (Corporation)

Choon-Beng Sia

Kiat Seng Yeo

Cheng Yeow Ng

Shao-fu Sanford Chu

Wang Ling Goh

Kok Wai Chew

Alex See

Toe Naing Swe

A method of manufacturing a 3-D spiral stacked inductor is provided having a substrate with a plurality of turns in a plurality of levels wherein the number of levels increases from an inner turn to the outer turn of the inductor. First and second connecting portions are respectively connected to an inner turn and an outermost turn, and a dielectric material contains the first and second connecting portions and the plurality of turns over the substrate.

Method of manufacturing 3-D spiral stacked inductor on semiconductor material

A 3-D spiral stacked inductor is provided having a substrate with a plurality of turns in a plurality of levels wherein the number of levels increases from an inner turn to the outer turn of the inductor. First and second connecting portions are respectively connected to an inner turn and an outermost turn, and dielectric material contains the first and second connecting portions and the plurality of turns over the substrate.

3-D spiral stacked inductor on semiconductor material

A parallel spiral stacked inductor and manufacturing method therefore is provided. A substrate has a plurality of turns in a plurality of levels, the plurality of turns having a center proximate and a center distal ends. A first plurality of vias connecting the center proximate ends of the plurality of turns and a second plurality of vias connecting the center distal ends of the plurality of turns. A first connecting portion connects to the center proximate ends of the plurality of turns and a second connecting portion connecting to the center distal end of the plurality of turns. A dielectric material contains the inductor.

Parallel spiral stacked inductor on semiconductor material

Growing community of inventors

Singapore, Singapore

Choon-Beng Sia