Taiwan Semiconductor Manufacturing Comp. Ltd.

Chon-Hwa Chu

Mu-Tsang Lin

Jian-Hong Chen

Ie-Fun Lai

Wen-Sheng Chien

Chia-Hung Chung

Tien-Wen Wang

Yu-Yi Wu

Chin-Chih Chen

Joseph W L Fang

Yi-Yu Wu

Yao-Wen Wu

An apparatus for fault detection and classification (FDC) specification management including a storage device and a process module. The storage device stores a specification management record and a chart profile record. The specification management record stores statistical algorithm settings of a parameter and the chart profile record stores chart frame and alarm condition information. The process module, which resides in a memory, receives a manipulation message corresponding to the specification management record, and accordingly manipulates the chart profile record.

Fault detection and classification (FDC) specification management apparatus and method thereof

A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.

Automatic statistical process control (SPC) chart generation apparatus and method thereof

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Taoyuan Hsien, Taiwan

Chon-Hwa Chu