Asml Netherlands B.v.

Cho Huak Teh

Wei Fang

Chuan Li

Zhaohui Guo

Yi-Ying Wang

Shih-Tsung Chen

Pang-Hsuan Huang

Shao-Wei Lai

Shih-Tsung Hsu

Jian-Min Liao

Ju Hao Chien

Robeter Jian

A server for knowledge recommendation for defect review. The server includes a processor electronically coupled to an electronic storage device storing a plurality of knowledge files related to wafer defects. The processor is configured to execute a set of instruction to cause the server to: receive a request for knowledge recommendation for inspecting an inspection image from a defect classification server; search for a knowledge file in the electronic storage device that matches the inspection image; and transmit the search result to the defect classification server.

Knowledge recommendation for defect review

A defect displaying method is provided in the disclosure. The method comprises acquiring defect group information from an image of a wafer, wherein the defect group information includes a set of correlations between a plurality of defects identified from the image and one or more corresponding assigned defect types and displaying at least some of the plurality of defects according to their corresponding assigned defect types.

Defect displaying method

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Los Altos, CA, United States of America

Cho Huak Teh