Taiwan Semiconductor Manufacturing Comp. Ltd.

Chiung Wen Hsu

Chia-Wei Chang

Yu-Ting Weng

Keng-Ying Liao

Szu-Hung Yang

Fo-Ju Lin

A semiconductor device includes a substrate, a fin structure protruding from the substrate, a gate insulating layer covering a channel region formed of the fin structure, a gate electrode layer covering the gate insulating layer, and isolation layers disposed on opposite sides of the fin structure. The fin structure includes a bottom portion, a neck portion, and a top portion sequentially disposed on the substrate. A width of the neck portion is less than a width of the bottom portion and a width of a portion of the top portion.

Semiconductor device and manufacturing method thereof

A semiconductor device and method for forming the semiconductor device are provided. A first layer is formed over a semiconductor layer, and a first patterned mask is formed over the first layer. A cyclic etch process is then performed to define a second patterned mask in the first layer. The cyclic etch process includes a first phase to form a polymer layer over the first patterned mask and a second phase to remove the polymer layer and to remove a portion of the first layer. A portion of the semiconductor layer is removed using the second patterned mask to define a fin from the semiconductor layer.

Semiconductor device and method of manufacture

Semiconductor device with fin structures and manufacturing method thereof

Manufacturing of semiconductor fin structure and manufacturing method of semiconductor device

A method includes performing a patterning step on a layer using a process gas. When the patterning step is performed, a signal strength is monitored, wherein the signal strength is from an emission spectrum of a compound generated from the patterning step. The compound includes an element in the patterned layer. At a time the signal strength is reduced to a pre-determined threshold value, the patterning step is stopped.

Methods for achieving width control in etching processes

Growing community of inventors

Tainan, Taiwan

Chiung Wen Hsu