Taiwan Semiconductor Manufacturing Comp. Ltd.

Chiung-Min Lin

Sheng-Hsiang Chuang

Yung-Lin Hsu

Yi-Ming Chen

Alan Yang

Guan-Cyun Li

Ming-Han Tsai

Yen-Ju Wei

Richard Lin

In an embodiment an automated material handling system (AMHS) for a semiconductor fabrication facility (FAB) includes: a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer; and a monitoring module configured to: detect a trigger event based on the sensor data, and initiate a remediation action in response to the trigger event.

Systems and methods for sensory automated material handing

A dual-function wafer handling apparatus for handling a wafer includes an aligner for rotating the wafer, an ID reader disposed corresponding to an edge of the wafer for reading an ID of the wafer, and an optical defect inspection unit for capturing images to analysis.

Dual-function wafer handling apparatus

Growing community of inventors

Zhubei, Taiwan

Chiung-Min Lin