Winbond Electronics Corporation

Chiung-Lin Hsu

Yu-Ting Chen

Ming-Che Lin

Chi-Ching Liu

Chang-Tsung Pai

Tz-Hau Guo

Chung-Hsuan Wang

Ming-Chih Hsu

Chang-Hsuan Wu

A semiconductor structure includes a substrate, a first support layer, and multiple support pillars. The substrate includes a monitoring region. The monitoring region includes a first region and a second region. The first support layer is located in the first region and the second region, and is located above the substrate. The support pillars are located in the second region. The support pillars penetrate the first support layer and are not connected to each other. Each of the support pillars extends toward the substrate.

Semiconductor structure

A three-dimensional semiconductor device includes multiple semiconductor device layers on a substrate, wherein each layer includes a first stacked structure, a first gate dielectric layer, a first semiconductor layer, a first channel layer, a first source region, a first drain region, and a first resistive random access memory cell. The first stacked structure on the substrate includes a first insulating layer and a first gate conductor layer. The first gate dielectric layer surrounds a sidewall of the first stacked structure. The first semiconductor layer surrounds a sidewall of the first gate dielectric layer. The first channel layer is in the first semiconductor layer. The first source region and the first drain region are on both sides of the first channel layer in the first semiconductor layer. The first resistive random access memory cell is on a first sidewall of the first semiconductor layer and connected to the first drain region.

Three-dimensional semiconductor device and method of fabricating the same

Provided are a resistive random access memory and a manufacturing method thereof. The resistive random access memory includes first, second, and third electrodes, a variable resistance layer, a selection layer, and first and second bit lines. The second electrode and the third electrode are on the first electrode. The second and third electrodes are separated from each other and overlapped with the sidewall and the top surface of the first electrode. The variable resistance layer is between the first and second electrodes and between the first and third electrodes. The selection layer is between the variable resistance layer and the first electrode. The first bit line is on the second electrode and electrically connected to the second electrode via a first contact. The second bit line is on the third electrode and electrically connected to the third electrode via a second contact.

Resistive random access memory and manufacturing method thereof

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Taichung, Taiwan

Chiung-Lin Hsu