Kla-tencor Technologies Corporation

Chiuman Yeung

Lisheng Gao

Tong Huang

Tommaso Torelli

Cho Huak Teh

Michal Kowalski

Jianxin Zhang

Dominic David

Jonathan Oakley

Lalita A Balasubramanian

Michael Gordon Scott

Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.

Computer-implemented methods and systems for classifying defects on a specimen

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Sunnyvale, CA, United States of America

Chiuman Yeung