Powerchip Semiconductor Manufacturing Corporation

Chiu-Chieh Lin

Ching-Ly Yueh

The invention provides a wafer map identification method, which includes the following steps: obtaining a wafer map of at least one to-be-identified wafer; performing an image processing operation on the wafer map and a reference pattern, wherein the image processing operation includes: performing a convolution operation on the wafer map and the reference pattern respectively, extracting a critical feature of the wafer map after the convolution operation, and calculating a weight distribution based on the reference pattern after the convolution operation; and calculating a similarity between the processed wafer map and the processed reference pattern to identify the wafer map. The invention also provides a computer-readable recording medium recording the above identification method.

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Hsinchu, Taiwan

Chiu-Chieh Lin