Agency for Science, Technology and Research

National University of Singapore

Institute of Microelectronics

Chirayarikathuveedu Sankarapillai Premachandran

Yu Jau Chen

Ranganathan Nagarajan

Vaidyanathan Kripesh

Janak Singh

Ling Xie

Ser Choong Chong

Pamidighantam Venkata Ramana

Colin James Richard Sheppard

Joseph Suresh Paul

A dispenser arrangement for fluidic dispensing control into a microfluidic component comprising an enclosed fluid holding area having a base portion and a top portion and a valve adapted to be movable between an open position and a closed position and positioned at least partially in the fluid holding area. The valve comprises an elongated hollow portion having a body and two ends adapted for fluid flow from the fluid holding area to the microfluidic component in the open position, a first opening on the body of the hollow portion positioned within the fluid holding area allowing fluid communication from the fluid holding area to the microfluidic component in the open position, a sealing portion connected to a first end of the hollow portion positioned within the fluid holding area adapted for sealing connection with the top portion of the fluid holding area in the closed position and a slant second opening at a second end of the hollow portion positioned outside of the fluid holding area. The slant second opening is adapted to pierce through a sealing layer covering the microfluidic component in the open position and to insert into a first substrate housing the microfluidic component in the closed position. A dispenser unit comprising a dispenser arrangement and an actuator, wherein the actuator is a piston is also disclosed.

Dispenser arrangement for fluidic dispensing control in microfluidic system

A microprobe that is capable of using an incident and reflected radiation ray for three-dimensional (3-D) bio-imaging. The microprobe comprises a hollow body closed at one end and having an aperture at an opposite end, at least one 3-D free space micromirror, at least one focusing lens, and a beam director or a beam coupler or other kind of device for beam coupling or splitting. The beam director is arranged at the aperture end of the hollow body and is adapted to direct the incident ray into the hollow body via the aperture. Within said hollow body is the at least one focusing lens and the at least one micromirror arranged respectively from the aperture, such that the distance between the focusing lens and the micromirror allows for the incident light ray to be directed onto the micromirror.

Microprobe for 3D bio-imaging, method for fabricating the same and use thereof

A method for forming wafers having through-wafer vias for wafer-level packaging of devices, the method comprising the steps of depositing metal on one of two wafers; bonding the two wafers using the metal deposited on the one of the two wafers; forming a through-wafer via in one of the two wafers; filling the through-wafer via with a conductive material; and forming a cavity in the one of the two wafers having the through-wafer via wherein the cavity is superposable over a device.

Wafer-level package for micro-electro-mechanical systems

Growing community of inventors

Singapore, Singapore

Chirayarikathuveedu Sankarapillai Premachandran