Entegris, Inc.

Other

Chiranjeevi Pydi

Joseph D Sweeney

Edward Edmiston Jones

Oleg Byl

Edward A Sturm

Joseph Robert Despres

Barry Lewis Chambers

Matthew B Donatucci

Gregory Scott Baumgart

A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as BF.

B2F4 manufacturing process

A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel, a valve head adapted for dispensing of fluid from the vessel, and an anti-pressure spike assembly adapted to combat pressure spiking in flow of fluid at inception of fluid dispensing.

Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels

An apparatus is described, as including a reaction region for contacting a reactant gas with a reactive solid under conditions effective to form an intermediate product, and an opening for allowing an unreacted portion of the gaseous reagent and the intermediate product to exit the reaction region. The apparatus can be beneficially employed to form a final product as a reaction product of the intermediate product and the reactant gas. The reaction of the reactant gas and reactive solid can be conducted in a first reaction zone, with the reaction of the reactant gas and intermediate product conducted in a second reaction zone. In a specific implementation, the reaction of the reactant gas and intermediate product is reversible, and the reactant gas and intermediate product are flowed to the second reaction zone at a controlled rate or in a controlled manner, to suppress back reaction forming the reactive solid.

Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates

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Danbury, CT, United States of America

Chiranjeevi Pydi