Applied Materials, Inc.

Chirag Shaileshbhai Khairnar

Kartik Bhupendra Shah

Umesh M Kelkar

Mats Larsson

Kevin A Papke

Karthikeyan Balaraman

Balamurugan Ramasamy

Rajasekhar Patibandla

One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of SiYMgAlO. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of SiYMgAlO.

Method for fabricating chamber parts

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Gujarat, India

Chirag Shaileshbhai Khairnar