At&t Bell Laboratories

Chiou T Chen

Dennis L Krause

A target which is a good conductor of heat and electricity is plasma sprayed with a weakly conducting material such as a metallic oxide. The target is then employed in a magnetron sputtering apparatus to sputter the material sprayed onto the target onto a substrate. The technique permits use of power densities and target sizes and shapes which are advantageous for sputtering substrates having large surface areas.

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Atkinson, NH, United States of America

Chiou T Chen