Other

Taiwan Semiconductor Manufacturing Comp. Ltd.

Ching Yu Huang

Tze-Liang Lee

Chunyao Wang

Chung-Ting Ko

Yung-Chih Wang

Wei-Che Hsieh

Hsin-Hao Yeh

Jui-Chi Wang

Robin Hsu

Ya Li Huang

Han-Chi Lin

Yueh F Wang

A method includes placing a wafer into a process chamber, and depositing a silicon nitride layer on a base layer of the wafer. The process of depositing the silicon nitride layer includes introducing a silicon-containing precursor into the process chamber, purging the silicon-containing precursor from the process chamber, introducing hydrogen radicals into the process chamber, purging the hydrogen radicals from the process chamber; introducing a nitrogen-containing precursor into the process chamber, and purging the nitrogen-containing precursor from the process chamber.

Forming low-stress silicon nitride layer through hydrogen treatment

A method includes etching a first portion and a second portion of a dummy gate stack to form a first opening and a second opening, respectively, and depositing a silicon nitride layer to fill the first opening and the second opening. The deposition of the silicon nitride layer comprises a first process selected from treating the silicon nitride layer using hydrogen radicals, implanting the silicon nitride layer, and combinations thereof. The method further includes etching a third portion of the dummy gate stack to form a trench, etching a semiconductor fin underlying the third portion to extend the trench down into a bulk portion of a semiconductor substrate underlying the dummy gate stack, and depositing a second silicon nitride layer into the trench.

Method of modulating stress of dielectric layers

A ceramic control valve includes a valve casing, and a control device including a linking seat and a control lever. The drive block of the control lever has a spherical surface. The receiving hole of the linking seat has a wall having a first portion in contact with the spherical surface of the drive block and a second portion spaced from the spherical surface of the drive block, thereby forming a plurality of gaps. Thus, the gaps located between the drive block and the receiving hole keep a smooth circulation of the air flow, thereby preventing the drive block from being jammed in the receiving hole due to deformation of heat expansion, so that the control lever is operated normally.

Ceramic control valve

A faucet valve includes a chamber defined in an underside thereof and a fixed plate is fixed in the chamber and has a first flat surface and a second flat surface defined in two respective raised portions of the fixed plate. A groove is defined between the first and second flat surfaces so as to receive grease therein. A hot water inlet, a cold water inlet and an outlet are defined through the first flat surface. A movable plate is mounted on the fixed plate and has an adjusting recess defined in an underside thereof. The movable plate is driven by a control rod extending through the body.

Valve structure for faucets

Toner cartridge

The present invention relates to a convenient awning assembly for parked cars which mainly consists of a pair of fixing frames mounted on car roof near front and rear portions thereof, a driving motor case disposed between the two fixing frames near one lateral side of car roof, two manually-operated awning roller assemblies separately fixed to the fixing frames to provide retractable awnings which can be adhered to windshields by sucker means when they are pulled out; a side awning roller assembly which has an retractable awning connected to a pair of power-actuated bars controlled by the motor in the driving motor case, and two storage compartments each being parallelly attached to inner side of the two fixing frames. With the present invention, a driver can have a shaded place to take a rest at any time he parks the car at a safe place and can provide a temporary rain awning for passengers in rainy days.

Convenient awning assembly for parked cars

Growing community of inventors

Hsinchu, Taiwan

Ching Yu Huang