Industrial Technology Research Institute

Ching-Sung Chiu

Jammy Chin-Ming Huang

Nanchou David Liu

Several methods for manufacturing field emission displays that operate using flat cone emitters are described. These methods are cost effective and relatively simple to implement. A key feature is the incorporation of chemical-mechanical polishing into the process. This allows the micro-cones, that would serve as cold cathodes in conventional structures, to be converted to flat cone emitters at the same time that the gate lines are being formed, the apexes of said flat cones being automatically located at the correct height relative to the gate lines.

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Chutung, Taiwan

Ching-Sung Chiu