Industrial Technology Research Institute

Ching-Ming Yeh

Hung-Ming Tai

Kai-Yu Cheng

Huang-Chi Huang

Jung-Tsung Chou

Chiung-Huei Huang

Jin-Liang Chen

Shih-Hsuan Kuo

Shih-Fang Lee

The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained.

Tilting adjustable surface profilometer

A fiber optic interferometric position sensor and measurement method thereof suitable for determining the moving direction of a measurement object in an environment of high electric or magnetic field strengths are disclosed. The fiber optic interferometric position sensor comprises at least one light source, a plurality of fiber optic couplers, a plurality of sensing fibers and a plurality of photodetectors. The fiber optic couplers are connected to the at least one light source, the photodetectors, and the sensing fibers, respectively. The measurement method comprises: providing a fiber optic interferometric position sensor and a measurement object, obtaining two initial signals having a 90-degree phase difference therebetween, obtaining two measured signals, correcting the measured signals by a bias correction method, obtaining the phase value from the two measured signals by an electronic interpolation technique, and obtaining the position of the measurement object after computation by using the phase value.

Fiber optic interferometric position sensor and measurement method thereof

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Hsinchu, Taiwan

Ching-Ming Yeh