Industrial Technology Research Institute

Nan Ya Technology Corporation

Tpk Advanced Solutions Inc.

Ching-Mao Huang

Shinn-Jen Chang

Wan-Jung Teng

Jheng-Ting Jhong

Huang Chen

Shu-Ya Tsai

Cha-Wen Chang

Yu-Hui Chen

Wei-Sheng Chen

Wei-Pin Lin

Jen-Yu Chen

The present disclosure provides a system and a method for controlling semiconductor manufacturing equipment. The system includes a sensor, a sensor interface, and an analysis unit. The sensor provides a sensor signal. The sensor interface receives the sensor signal and generates an input signal for a database server. A front-end subsystem receives the input signal from the database server and performs a comparison process to generate a data signal. A calculation subsystem performs an artificial intelligence analytical process to generate an optimal parameter set and a simulated result map according to the data signal. A message and tuning subsystem generates an alert signal and a feedback signal according to the optimal parameter set and the simulated result map, and the message and tuning subsystem transmits the alert message to a user of the semiconductor manufacturing equipment.

System and method for controlling semiconductor manufacturing equipment

A touch module includes a substrate, a touch sensing layer, a first transparent adhesive layer, and a second transparent adhesive layer. The substrate has a visible area and a peripheral area surrounding the visible area. The touch sensing layer is disposed on the substrate and located in the visible area. The first transparent adhesive layer is disposed on the touch sensing layer, and a dielectric constant of the first transparent adhesive layer is between 1.5 and 3.0. The second transparent adhesive layer is disposed on the first transparent adhesive layer, and a dielectric constant of the second transparent adhesive layer is between 3.0 and 8.0.

Touch module

A polymer is disclosed, which includes a structure of Formula 1 or Formula 2. Ris a Calkylene group or a Carylene group, Ris a Calkyl group, and Ris a functional group of Formula 3. Each of X, X, X, X, X, and X, being the same or different, is H or methyl. Each of p, q, and r, being the same or different, is an integer of 1 to 60. Ris &#x2014;CH&#x2014;, &#x2014;CH&#x2014;, Each of m and n, being the same or different, is an integer of 0 to 50, and m+n&#x2260;0.

Polymer and dispersion

Growing community of inventors

Taipei, Taiwan

Ching-Mao Huang