Taiwan Semiconductor Manufacturing Comp. Ltd.

Ching-Jung Hsu

Yung-Long Chen

Chi-Tung Lai

Ming-Chieh Hsu

Yu-Chun Chen

Fang-Pin Chiang

Feng-An Yang

Bo-Zhang Chen

Yung-Ti Hung

Chun-Feng Hsu

Chi-Wei Chiu

Jin-Feng Shiu

Chong-Cheng Su

Nan-Peng Cheng

Rouh-Jier Wang

Wan-Yu Chen

Han-Ru Hung

A slurry blending tool may include a blending tank to receive and blend one or more materials into a slurry, and at least one inlet pipe connected to the blending tank and to provide the one or more materials to the blending tank. The at least one inlet pipe may vertically enter the blending tank and may not contact the blending tank. The slurry blending tool may include a blending pump partially provided within the blending tank and to blend the one or more materials into the slurry. The slurry blending tool may include an outlet pipe connected to the blending pump and to remove the slurry from the blending tank.

High-throughput, precise semiconductor slurry blending tool

A chemical dispensing system is capable of simultaneously supplying a semiconductor processing chemical for production and testing through the use of independent chemical supply lines, which reduces production downtime of an associated semiconductor process, increases throughput and capability of the semiconductor process, and/or the like. Moreover, the capability to simultaneously supply the semiconductor processing chemical for production and testing allows for an increased quantity of semiconductor processing chemical batches to be tested with minimal impact to production, which increases quality control over the semiconductor processing chemical. In addition, the independent chemical supply lines may be used to supply the semiconductor processing chemical to production while independently filtering semiconductor processing chemical directly from a storage drum through a filtration loop.

Chemical dispensing system

A fluid supply system includes a pressure tank configured to contain a pressurized gas and a fluid, a delivery point configured to be connected to a point of use, a recirculation piping connecting the pressure tank to the delivery point, and a return pump connected to the recirculation piping. The recirculation piping defines a circulation path for the fluid from the pressure tank through the delivery point and back to the pressure tank. The return pump is downstream of the delivery point and upstream of the pressure tank in the circulation path.

Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment

A method and an apparatus for recycling waste sulfuric acid solution are provided. The method includes providing a reaction tank and introducing a waste sulfuric acid (HSO) solution into the reaction tank, and the waste sulfuric acid solution includes hydrogen peroxide (HO). The method also includes supplying a compound containing chlorine into the reaction tank. The method further includes mixing the compound containing chlorine with the waste sulfuric acid solution to promote a chemical reaction that decomposes the hydrogen peroxide (HO).

Method and apparatus for recycling waste sulfuric acid

Growing community of inventors

Hsinchu, Taiwan

Ching-Jung Hsu