Taiwan Semiconductor Manufacturing Comp. Ltd.

Ching-Hsien Chen

Jen-Pan Wang

Chien-Hsuan Liu

Chao-Chi Chen

Shu-Ling Feng

A method comprises providing a semiconductor substrate having at least one layer of a material over the substrate. A sound is applied to the substrate, such that a sound wave is reflected by a top surface of the layer of material The sound wave is detected using a sensor. A topography of the top surface is determined based on the detected sound wave. The determined topography is used to control an immersion lithography process.

Focus control apparatus for photolithography

Focus control method for photolithography

A system for automatically receiving, verifying, and processing a request of a fabricating organization for manufacture of a product executes a method for verifying a request of a fabricating organization for manufacture of a product begins by receiving the request for manufacture of the product from a design organization. An acknowledgement of the request is generated and transferred to the design organization. The request is then verified that a format and syntax of the request complies with requirements for format and syntax of the request as established by the fabricating organization. If the format and syntax does not comply with the requirements for the format and syntax, the request is rejected for manufacture. However, if the format and syntax has minor non-compliances to the requirements for format and syntax, the minor non-compliances are corrected such that the request is in compliance to the requirements for format and syntax. When the format and syntax is in compliance with the requirements, transferring the request to initiate manufacture of the product. The verification of the request begins by examining the request for manufacture to verify that tools required for the manufacture are correctly identified. The verification of the request continues with examining the request for manufacture to verify that process steps required for the manufacture are correctly identified. The verification continues with examining the request for manufacture to verify that product fabrication instructions required for the manufacture have a correct syntax.

Growing community of inventors

Kausiung, Taiwan

Ching-Hsien Chen