Hannstar Display Corporation

Ching-Chieh Lee

Chun-Chieh Wang

Li-Fang Chiu

This invention discloses an etching solution and a manufacturing method of a display panel. The method includes following steps: providing a substrate; forming a conductive layer stack including a first sub-layer, a second sub-layer and a third sub-layer on the substrate, the first sub-layer includes molybdenum, the second sub-layer is disposed on the first sub-layer and includes a transparent conductive material including indium-containing oxide, the third sub-layer is disposed between the first sub-layer and the second sub-layer and includes silver or silver alloy; performing an etching process, the first sub-layer, the second sub-layer and the third sub-layer are etched by an etching solution to form a first patterned sub-layer, a second patterned sub-layer and a third patterned sub-layer. The etching solution includes 1 to 3 wt % of nitric acid, 30 to 50 wt % of acetic acid, 30 to 50 wt % of phosphoric acid and a remaining amount of water.

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Kaohsiung, Taiwan

Ching-Chieh Lee