Taiwan Semiconductor Manufacturing Comp. Ltd.

Chin Wei Chuang

Sheng-Chen Wang

ChunHung Chen

Yu Chi Tsai

Bo-An Chen

Chen-Hua Tsai

Chunhung Chen

Systems and methods are provided for predicting irregular motions of one or more mechanical components of a semiconductor processing apparatus. A mechanical motion irregular prediction system includes one or more motion sensors that sense motion-related parameters associated with at least one mechanical component of a semiconductor processing apparatus. The one or more motion sensors output sensing signals based on the sensed motion-related parameters. Defect prediction circuitry predicts an irregular motion of the at least one mechanical component based on the sensing signals.

Irregular mechanical motion detection systems and method

A planarization process is performed to a wafer. In various embodiments, the planarization process may include a chemical mechanical polishing (CMP) process. A byproduct generated by the planarization process is collected and analyzed. Based on the analysis, one or more process controls are performed for the planarization process. In some embodiments, the process controls include but are not limited to process endpoint detection or halting the planarization process based on detecting an error associated with the planarization process.

Performing planarization process controls in semiconductor fabrication

Growing community of inventors

Taichung, Taiwan

Chin Wei Chuang