Wistron Neweb Corporation

Taiwan Semiconductor Manufacturing Comp. Ltd.

Grace Biotech Corporation

Chin-Wei Chen

Bau-Yi Huang

Sheng-Yuan Lin

Yuan-Hsin Chi

Yin-Tun Chou

C Will Chen

Ching-Huang Wang

Yao-Fong Dai

Ming-Yi Shen

Hsin-Lin Wu

Pei-Yuan Tai

Yun-Ping Wang

The present disclosure relates to exclusion rings for use in processing a semiconductor substrate in a processing chamber, such as a chemical vapor deposition chamber. The exclusion ring includes an alignment structure that cooperates with an alignment structure on a platen on which the exclusion ring will rest during processing of the wafer. The first alignment structure includes a guiding surface which promotes the reception of and positioning of the second alignment structure within the first alignment structure. Methods of utilizing the described exclusion rings are also described.

Structures and methods for processing a semiconductor substrate

Extension module

Wireless signal transmission device

A starch-based biodegradable material composition includes: an enzyme-hydrolyzed starch; and a biodegradable polyester selected from at least one of an aliphatic polyester of polybutylene succinate and an aliphatic-aromatic copolyester. The enzyme-hydrolyzed starch is prepared by hydrolyzing a native starch using a starch-hydrolyzing enzyme. The starch-hydrolyzing enzyme has an activity unit ranging from 15000 to 40000.

Starch-based biodegradable material composition

Growing community of inventors

Hsinchu, Taiwan

Chin-Wei Chen