Taiwan Semiconductor Manufacturing Comp. Ltd.

Chin-Chih Chen

Mu-Tsang Lin

Jian-Hong Chen

Ming-Hung Tseng

Tien-Wen Wang

Yu-Yi Wu

Chon-Hwa Chu

Ie-Fun Lai

Wen-Sheng Chien

Tzu-Chan Wang

Wei-Shin Tien

Joseph W L Fang

Yao-Wen Wu

An o-ring sealing device, molded with an imbedded piezoelectric element, for use in vacuum systems. The imbedded element, of a circumferential length, has an oblong cross-sectional shape, the oblong shape having a pair of ends for externally connecting to a signal processor. The piezoelectric element is concentrically disposed and centrally placed within a mold cavity of a predetermined diameter. The cavity is filled with an elastic material fully encapsulating and insulating the piezoelectric element.

Piezoelectric o-ring transducer

A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.

Automatic statistical process control (SPC) chart generation apparatus and method thereof

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Hsinchu, Taiwan

Chin-Chih Chen