Industrial Technology Research Institute

Macronix International Co., Ltd.

Macronix Internationalco., Ltd.

Chin Chen Yang

Yu Chi Lee

Hong-Yu Lin

Fang I Shieh

Su Yu Fun

Chi Yuan Wu

A method of forming a mask for optically transferring a lithographic pattern having a plurality of isolated elements onto a semiconductor substrate, wherein spacing between these isolated elements is controlled according to a given pitch, the method comprising: disposing a plurality of assist features around each of the plurality of isolated elements, each assist feature near to a corner of one isolated element, each assist feature having a width, a length, a first separation parameter defining a distance between individual assist features, and a second separation parameter defining a distance between each of the plurality of assist features and each corresponding adjacent isolated element in the plurality of isolated elements; determining optimized values of the width, the length, the first separation parameter, and the second separation parameter; and setting an assist feature rule according to the given pitch and the optimized values.

Method of forming a mask design having advanced oriented assist features for integrated circuit hole patterns

An oriented assist feature is described that permits transferring of a lithographic pattern corresponding to an integrated circuit from a mask onto a semiconductor substrate. The oriented assist feature does not exhibit a forbidden pitch phenomenon, thereby providing a wide photo process window for a hole pattern.

Method of optically transferring a pattern from a mask having advanced oriented assist features for integrated circuit hole patterns

A repairable TFT-LCD assembly and a method for fabricating such assembly have been disclosed. In the repairable TFT-LCD assembly, a novel separation tape is utilized between the TFT and the LCD substrate such that when the tape is pulled in a perpendicular direction to the planar surface of the LCD substrate, the TFT can be separated from the assembly without causing damages to the LCD substrate. The separation tape is fabricated of a polymeric based insulating material with a multiplicity of apertures filled with a conductive metal. The back of the separation tape is laminated with a copper film which is patterned corresponding to the pattern of conductive pads provided on the LCD substrate. The present invention is further directed to a method for fabricating the separation tape for use in a repairable TFT-LCD assembly.

Repairable TFT-LCD assembly and method for making in which a separation tape positioned between two anisotropic conductive films

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Hsinchu, Taiwan

Chin Chen Yang