Taiwan Semiconductor Manufacturing Comp. Ltd.

Lite-on Technology Corporation

Chin-Chen Kuo

Hung-Jen Hsu

Yu-Kung Hsiao

Yi-Ming Dai

Chih-Kung Chang

Fu-Tien Weng

Te-Fu Tseng

Fu-Tien Wong

Chung-Sheng Hsiung

Sheng-Liang Pan

Kuo-Liang Lu

Hsien-Ming Lin

Chin-Kung Chang

Chiung-Yuan Chang

Po-Wen Lin

Sung-Yung Yang

An image sensor device and method for forming said device are described. The image sensor structure comprises a substrate with photodiodes, an interconnect structure formed on the substrate, a color filter layer above the interconnect structure, a first microlens array, an overcoat layer, and a second microlens array. A key feature is that a second microlens has a larger radius of curvature than a first microlens. Additionally, each first microlens and second microlens is a flat convex lens. Thus, a thicker second microlens with a short focal length is aligned above a thinner first microlens having a long focal length. A light column that includes a first microlens, a second microlens and a color filter region is formed above each photodiode. A second embodiment involves replacing a second microlens in each light column with a plurality of smaller second microlenses that focus light onto a first microlens.

Effective method to improve sub-micron color filter sensitivity

An apparatus and a method for determining output signals according to pressure and depressing time mainly includes a timer, a scanner and a keyboard connecting electronically to the timer and the scanner. The keyboard has a plurality of button keys. When in use, the timer is set to zero and stops counting time. Then the scanner scans the keyboard to locate the button key being depressed by an external force. A signal is output depending on the external force. A first signal is output when the external force is small. When the external force is large and the time counted by the timer does not exceed a selected time period, the first signal is output. When the time counted by the timer exceeds the selected time period, a second signal is output. Thus input information may be entered through fewer button keys, and injury that might otherwise occur by using composite keys may be avoided.

Apparatus and method for determining output signals according to pressure and depressing time

A color filter includes a substrate having a plurality of scribe lines arranged to form at least one filter region surrounded by the scribe lines. The scribe lines are at least partially filled with a resist material. At least one color resist layer is formed above the substrate within the at least one filter region.

Color filter with resist material in scribe lines

A method of fabricating microlens devices. The method includes filling the bond pad areas and scribe lines, or other areas, to improve the topography of the semiconductor wafer surface. A microlens material is applied to the surface after the bond pad areas and scribe lines have been filled. Because of the improved topography, the thickness of the microlens material is more uniform, thereby facilitating the formation of uniformly shaped microlenses.

Method for fabricating microlens with lithographic process

A method for fabricating a microelectronic product provides for forming a planarizing layer upon a bond pad and a topographic feature, both formed laterally separated over a substrate. The planarizing layer is formed with a diminished thickness upon the bond pad such that it may be readily etched to expose the bond pad while employing as a mask an additional layer formed over the topographic feature but not over the bond pad. The method is particularly useful for forming color filter sensor image array optoelectronic products with attenuated bond pad corrosion.

Method for fabricating microelectronic product with attenuated bond pad corrosion

Within a method for forming a color filter image array optoelectronic microelectronic fabrication, and the color filter image array optoelectronic microelectronic fabrication formed employing the method, there is provided a substrate having formed therein a series of photo active regions. There is also formed over the substrate at least one color filter layer having formed therein a color filter region having a concave upper surface. There is also formed upon the at least one color filter layer and planarizing the at least one color filter region having the concave upper surface, a planarizing layer. The planarizing layer provides for enhanced resolution of the color filter image array optoelectronic microelectronic fabrication.

Color filter image array optoelectronic microelectronic fabrication with a planarizing layer formed upon a concave surfaced color filter region

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Taipei, Taiwan

Chin-Chen Kuo