Atomic Energy Council-institute of Nuclear Energy Research

Institute of Nuclear Energy Research, Atomic Energy Council

Chin-Chen Chiang

Tsun-Neng Yang

Shan-Ming Lan

Wei-Yang Ma

Chien-Te Ku

Yu-Hsiang Huang

Ying-Ru Chen

Jin-Jang Jheng

An in-situ gettering method for removing impurities from the surface and interior of a upgraded metallurgical grade silicon wafer is continuously conducted in a reaction chamber. Chloride gas is mixed with carrier gas. The gaseous mixture is used to clean the surface of the silicon wafer. Then, the gaseous mixture is used to form a porous structure on the surface of the silicon wafer before hot annealing is executed. Finally, the gaseous mixture is used to execute hot etching on the surface of the silicon wafer and remove the porous structure from the surface of the silicon wafer. As the chloride gas is used to clean the surface of the silicon wafer and form the porous structure on the surface of the silicon wafer, external gettering is improved. Moreover, interstitial-type metal impurities are effectively removed from the interior of the silicon wafer.

In-situ gettering method for removing metal impurities from the surface and interior of a upgraded metallurgical grade silicon wafer

A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmospheric pressure chemical vapor deposition. A titanium-based compound film is formed on the ceramic substrate.

Method for making titanium-based compound film of poly silicon solar cell

A silicon quantum dot fluorescent lamp is made via providing a high voltage source between a cathode assembly and an anode assembly. The cathode assembly is made by providing a first substrate, coating a buffer layer on the first substrate, coating a catalytic layer on the buffer layer and providing a plurality of nanometer discharging elements on the catalytic layer. The anode assembly is made via providing a second substrate, coating a silicon quantum dot fluorescent film on the second substrate with and coating a metal film on the silicon quantum dot fluorescent film.

Method for making a silicon quantum dot fluorescent lamp

A method is disclosed to make a multi-crystalline silicon film of a solar cell. The method includes the step of providing a ceramic substrate, the step of providing a titanium-based film on the ceramic substrate, the step of providing a p-type back surface field layer on the titanium-based film, the step of providing a p-type light-soaking layer on the p-type back surface field layer and the step of conducting n-type diffusive deposition of phosphine on the p-type light-soaking layer based on atmospheric pressure chemical vapor deposition, thus forming an n-type emitter on the p-type light-soaking layer.

Method for making multi-crystalline film of solar cell

In a method for making a pulsed high-voltage silicon quantum dot fluorescent lamp, an excitation source is made by providing a first substrate, coating the first substrate with a buffer layer of titanium, coating the buffer layer with a catalytic layer of a material selected from a group consisting of nickel, aluminum and platinum and providing a plurality of nanometer discharging elements one the catalytic layer. An emission source is made by providing a second substrate, coating the second substrate with a transparent electrode film of titanium nitride and coating the transparent electrode film with a silicon quantum dot fluorescent film comprising silicon quantum dots. A pulsed high-voltage source is provided between the excitation source and the emission source to generate a pulsed field-effect electric field to cause the nanometer discharging elements to release electrons and accelerate the electrons to excite the silicon quantum dots to emit pulsed visible light.

Pulsed high-voltage silicon quantum dot fluorescent lamp

A method is disclosed for making an anti-reflection film of a solar cell. The method includes the step of providing a laminate. The laminate includes a ceramic substrate, a titanium-based compound film, a ptype poly-silicon back surface field, a ptype poly-silicon light-soaking film and an ntype poly-silicon emitter. The laminate is passivated with SiCNO:Ar plasma in a plasma-enhanced vapor deposition device, thus filling the dangling bonds of the silicon atoms at the surface of the ntype poly-silicon emitter, the dangling bonds of the silicon grains at the grain boundaries of the ptype poly-silicon light-soaking film and the dangling bonds of the silicon atoms in the ptype poly-silicon back surface field. Finally, the ntype poly-silicon emitter is coated with an anti-reflection film of SiCN/SiO.

Method for making an anti-reflection film of a solar cell

Dichlorosilane and diborane are deposited on the titanium-based alloy film to grow a ptype back surface field film. The temperature is raised to grow a ptype light-soaking film on the ptype back surface field film. Phosphine is deposited on the ptype light-soaking film to form an ntype emitter. Thus, an n-p-plaminate is provided on the titanium-based alloy film. SiCNO:Ar plasma is used to passivate the n-p-plaminate, thus forming an anti-reflection film of SiCN/SiO2 on the ntype emitter. The n-p-plaminate is etched in a patterned mask process. A ptype ohmic contact is formed on the titanium-based alloy film. The anti-reflection film is etched in a patterned mask process. The ntype emitter is coated with a titanium/palladium/silver alloy film that is annealed in hydrogen. An ntype ohmic contact is formed on the ntype emitter.

Process for making multi-crystalline silicon thin-film solar cells

A method for making a tandem solar cell includes the steps of providing a ceramic substrate, providing a titanium-based layer on the ceramic substrate, providing an n-p-plaminate on the titanium-based layer, passivating the n-p-plaminate, providing an n-i-p laminate on the n-p-plaminate, providing a p-type ohmic contact, providing an n-type ohmic contact providing an anti-reflection layer of SiCN/SiOon the n-i-p laminate.

Tandem solar cell including an amorphous silicon carbide layer and a multi-crystalline silicon layer

A solar cell is prepared. The solar cell is photo-sensitized. The solar cell has a semiconductor layer. And carbon nanotubes are deposited on the semiconductor layer with an arrangement. The solar cell is prepared with a reduced amount of fabrication material, a lowered fabrication cost and a prolonged lifetime.

Growing community of inventors

Taoyuan County, Taiwan

Chin-Chen Chiang