Seiko Epson Corporation

Chikara Kojima

Koji Ohashi

Hironori Suzuki

Kanechika Kiyose

Tomohide Onogi

Eiju Hirai

Takahiro Kamijo

Eiji Osawa

Mitsuru Miyasaka

Motoki Takabe

Koji Sumi

Hiroshi Ito

Shiro Yazaki

Hiroshi Matsuda

Shuichi Tanaka

Toshihiro Shimizu

Takayuki Yonemura

Jiro Kato

Tatsuro Torimoto

Katsuhiro Imai

Tomohiro Sayama

Yasuhiro Itayama

Yasuyuki Matsumoto

Hikaru Iwai

Mio Sasaki

Makoto Furuhata

Keita Kubo

Yoshinao Miyata

Yuma Fukuzawa

Tetsuya Isshiki

Naoto Yokoyama

Xiaoxing Wang

Seiji Izuo

Takumi Yamaoka

An ultrasound probe includes: an ultrasound device configured to perform at least one of transmission and reception of an ultrasound wave; and a case housing the ultrasound device. The ultrasound device includes a vibration plate and a piezoelectric element disposed at the vibration plate. The case is provided with an opening facing the vibration plate, and a first communication hole that is provided at a position different from a position of the opening and that communicates an internal space of the case with outside of the case. The case includes a sealing mechanism configured to prevent entry of a water droplet from the opening into the internal space.

Ultrasound probe

A fluid device includes: a flow path through which a fluid flows; and an ultrasonic wave application device including an ultrasonic element that transmits an ultrasonic wave, in which the flow path has, as flow path wall surfaces, an ultrasonic wave application surface that applies, to the fluid, the ultrasonic wave transmitted from the ultrasonic element, and a reflection surface that reflects the ultrasonic wave applied to the fluid from the ultrasonic wave application surface, and the reflection surface has a concave curved surface shape.

Fluid device

A fluid device includes a flow path through which a fluid flows, and an ultrasonic element that transmits an ultrasonic wave to the fluid to generate a standing wave in the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic element includes a vibrator having a fluid contact surface that comes into contact with the fluid, and a piezoelectric element that is provided at the vibrator and that flexurally vibrates the vibrator in a normal direction of the fluid contact surface. When a thickness of the vibrator in the normal direction is t, a sound velocity of a medium of the fluid is C, an average sound velocity of a longitudinal wave transmitted in the vibrator is C′, a dimension of the flow path in the first direction is L, and a mode order of the standing wave is n, the following expression is satisfied.

An ultrasonic element includes a substrate in which an opening is formed, a vibrating plate provided at the substrate, the vibrating plate including a first surface in contact with the substrate, the vibrating plate blocking the opening, a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate, a protective substrate facing the second surface and protecting the piezoelectric element, and a suppressing unit provided between the protective substrate and the vibrating plate, the suppressing unit being configured to suppress a vibration of the vibrating plate, in which in the piezoelectric element, a first electrode, a piezoelectric layer, and a second electrode are stacked in this order from the second surface, and an active part is a part of the vibrating plate where the first electrode, the piezoelectric layer, and the second electrode overlap, the suppressing unit is provided around the active part, and a slit is formed in the suppressing unit, in plan view from a stacking direction.

Ultrasonic element and ultrasonic device

An ultrasonic device includes a substrate, a transmitter provided at the substrate and configured to transmit an ultrasonic wave to an object, and a receiver provided at a position different from the transmitter at the substrate and configured to receive an ultrasonic wave reflected by the object. A resonance frequency of the transmitter is higher than a resonance frequency of the receiver. An anti-resonance frequency of the receiver is included in a predetermined frequency band including the resonance frequency of the transmitter.

Ultrasonic device

A mounting structure includes: a first substrate that has a first surface on which a functional element is provided; a wiring portion that is provided at a position, which is different from a position of the functional element on the first surface, and is conductively connected to the functional element; a second substrate that has a second surface that is opposite to the first surface; and a conduction portion that is provided on the second surface, is connected to the wiring portion, and is conductively connected the functional element. The shortest distance between the functional element and the second substrate is longer than the longest distance between the second substrate and a position where the wiring portion is connected to the conduction portion.

Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus

A fluid device includes: a flow path through which a fluid flows; and an ultrasonic wave transmitter configured to transmit an ultrasonic wave to generate a standing wave to the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic wave transmitter is in contact with the fluid and faces an antinode region corresponding to any antinode in the standing wave.

A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.

Piezoelectric device having plurality of vibrating regions and electronic apparatus

A piezoelectric element device includes: a substrate including a plurality of vibrating portions having a first vibrating portion and a second vibrating portion; a piezoelectric element group in which a plurality of piezoelectric elements having a first piezoelectric element and a second piezoelectric element provided in the plurality of vibrating portions are coupled in parallel to each other; a plurality of load detectors having a first load detector including the first vibrating portion and the first piezoelectric element provided in the first vibrating portion and a second load detector including the second vibrating portion and the second piezoelectric element provided in the second vibrating portion; and a resin layer covering the piezoelectric element group. The first load detector resonates at a first resonance frequency, the second load detector resonates at a second resonance frequency, the first resonance frequency and the second resonance frequency are different from each other, the first resonance frequency changes in accordance with a load applied to the first load detectors via the resin layer, the second resonance frequency changes in accordance with a load applied to the second load detectors via the resin layer, and a first resonance frequency change range, which are changeable range of the first resonance frequency, and a second resonance frequency change range, which are changeable range of the second resonance frequency, do not overlap each other.

Piezoelectric element device, piezoelectric element apparatus, and load detection method

An ultrasonic device includes a substrate having a plurality of opening parts and a wall, a vibrating plate closing the opening parts, and vibrators provided to the vibrating plate, wherein the plurality of opening parts includes a first opening part, a second opening part adjacent to the first opening part via a first wall, and a third opening part adjacent to the first opening part via a second wall, a first vibrating section closing the first opening part and the vibrator constitute a first ultrasonic transmitter, a second vibrating section closing the second opening part and the vibrator constitute an ultrasonic receiver, a third vibrating section closing the third opening part and the vibrator constitute a second ultrasonic transmitter, and the wall width of the first wall is larger than the wall width of the second wall.

Ultrasonic device to suppress influence of crosstalk between channels

A fluid device includes: a flow path through which a fluid flows; a pressure chamber spaced apart from the flow path in a first direction (Y direction) orthogonal to a flowing direction of the fluid in the flow path; a communication path that is formed along the Y direction and that communicates the flow path with the pressure chamber; and an ultrasonic wave transmitter configured to transmit ultrasonic waves to the fluid in the pressure chamber to generate a standing wave along the Y direction in the flow path.

A piezoelectric actuator includes a vibrating plate including a first surface that closes an opening provided in a substrate and a second surface in which a plurality of piezoelectric elements is provided, a suppression part configured to suppress a vibration of the vibrating plate, and a first wall and a second wall protruding from the first surface to the opening. When a portion where the first electrode, the piezoelectric layer and the second electrode overlap each other is an active part of the piezoelectric element, the first wall and the second wall are provided to sandwich the active part in plan view from the stacking direction of the first electrode, the piezoelectric layer and the second electrode, and the second wall is different from the first wall at least in one of the width, height, length and physical property.

Piezoelectric actuator, ultrasound element, ultrasound probe, ultrasound device, and electronic device

A fluid device includes: a flow main body including a side wall along a first axis and configured to flow a fluid from an inflow portion provided at one side of the first axis toward an outflow portion provided at the other side of the first axis; a plate provided at the other side of the first axis of the flow main body and having a first surface intersecting the first axis; a standing wall extending along the first axis from the first surface toward the one side of the first axis and having a length along the first axis shorter than the side wall; and an ultrasonic element disposed at an outer side of a collection region of the plate and configured to transmit an ultrasonic wave along the first axis when the standing wall and a region surrounded by the standing wall on the first surface are defined as the collection region.

An ultrasonic device includes a base material that has an opening, a vibration plate that is provided on the base material and closes the opening, and a piezoelectric element that is provided on the vibration plate, in which the vibration plate has a first layer provided on the base material, and a second layer that is disposed between the first layer and the piezoelectric element and that suppresses diffusion of a component contained in the piezoelectric element, and a bending rigidity of the second layer is equal to or larger than a bending rigidity of the first layer.

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Matsumoto, Japan

Chikara Kojima