Sanyo Electric Co., Ltd.

Chikao Fujinuma

Tadayoshi Takada

Shigeaki Okawa

Hirotsugu Hata

Osamu Kitamura

Nobuyuki Sekikawa

Toshimasa Sadakata

Teruo Tabata

Yoshiaki Sano

Collector regions ( ) with films capable of withstanding high voltage by laminating 4 epitaxial layers when the collector regions ( ) are formed. In order to reduce effects caused by interference between the transistors ( ) and also reduce parasitic transistor, the epitaxial layers and substrate are etched in a V-groove. Each etched region is dielectrically isolated by the poly-Si ( ).

Semiconductor integrated circuit device

A buried layer of a collector region and a buried layer of a collector taking-out region are formed at the same time at each epitaxial layer when the collector region and the collector taking-out region of the semiconductor integrated circuit device according to the invention. Each buried layer is diffused to connect, and etched in V-groove. By that, the collector region and collector taking-out region made thick in film are formed at the same time so as to realize the semiconductor integrated circuit device of high withstanding voltage.

Method for manufacturing semiconductor integrated circuit device

A method of manufacturing a semiconductor integrated circuit comprises the steps of: forming an epitaxial layer covering a semiconductor substrate and buried layers; forming isolation regions dividing the epitaxial layer into a plurality of islands; forming a lower electrode region of an MIS type capacitor in one of the islands; forming a base region of a vertical bipolar transistor simultaneously with or independently from the lower electrode in another island; depositing a thin dielectric layer of the MIS type capacitor on a portion of the lower electrode region; thereafter selectively diffusing impurities into the surface layer of the base region so as to form an emitter region of the vertical bipolar transistor; and forming an upper electrode of the MIS type capacitor on the thin dielectric layer.

Semiconductor integrated circuit and manufacturing method therefor

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Gunma, Japan

Chikao Fujinuma