Shin-Etsu Polymer Co., Ltd.

Chiho Seki

Hideo Kudo

Tsutomu Suzuki

Takashi Matsuo

Tsutomu c/o Shin-Etsu Polymer Co Ltd Suzuki

Hideo c/o Shin-Etsu Handotai Co Ltd Kudo

Provided are a gasket member for a substrate-holding container which is little liable to contamination of the substrate materials contained with organic matters due to the low content of organic matters to be emitted as a gas still without decreasing the operability in opening and closing of the covering as well as a substrate-holding container by using the same. The gasket member for a substrate-holding container provided is formed from a thermoplastic polyester-based elastomer resin containing absolutely no softening agent and having a surface hardness not exceeding 80A by the hardness testing method specified in JIS K6301, of which the amount of gas emission as determined under heating conditions for 60 minutes at 80&#xb0; C. does not exceed 10 ppm based on the weight of the material. Disclosure is given of a polyester-based block copolymer suitable as a molding material of the said gasket member.

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Saitama-ken, Japan

Chiho Seki