Taiwan Semiconductor Manufacturing Comp. Ltd.

Advanced Optoelectronic Technology, Inc.

Tsinghua University

Chih-Yung Lin

Min-Tsun Hsieh

Wen-Liang Tseng

Po-Nien Chen

Ching-Lien Yeh

Lung-Hsin Chen

Chi-Wei Liao

Jiefeng Lin

Jhon Jhy Liaw

Chen Hua Tsai

Kuo-Hua Pan

Ta-Chun Lin

Yu-Chiun Lin

Hsiao-Lan Yang

Buo-Chin Hsu

Jeng-Ya David Yeh

Chia-Chen Chang

Hsiao-Han Liu

Chung-Yu Chiang

Bo-Shiuan Shie

Hoppy Lee

Pei-Hsun Wu

Yi-Hsuan Chung

Ming-Hung Han

Hsing-Hui Hsu

Henry Kwong

Chung-Hui Chen

Dian-Sheg Yu

Hao-Chieh Chan

Ann-Shyn Chiang

Hsiu-Ming Chang

Jian-Shihn Tsang

Chang-Huain Hsieh

Chao-Chun Chuang

Chuan-Fu Yang

Yue-Zhi Chen

Zhen Geng

Kitchun Kwong

Taicheng Shieh

A semiconductor device includes a substrate having a first region and a second region, a first transistor in the first region, a second transistor in the first region, and a third transistor in the second region. The first transistor includes a first channel layer and a first gate dielectric layer on the first channel layer. The second transistor includes a second channel layer and a second gate dielectric layer on the second channel layer. The second gate dielectric layer is thicker than the first gate dielectric layer. The third transistor includes a third channel layer and a third gate dielectric layer on the third channel layer. The third gate dielectric layer is thicker than the second gate dielectric layer.

Gate-all-around devices having gate dielectric layers of varying thicknesses and method of forming the same

Examples of an integrated circuit with a capacitor structure and a method for forming the integrated circuit are provided herein. In some examples, an integrated circuit device includes a substrate and a trench isolation material disposed on the substrate. An isolation structure is disposed on the trench isolation material. A first electrode disposed on the isolation structure, and a second electrode disposed on the isolation structure. A capacitor dielectric is disposed on the isolation structure between the first electrode and the second electrode. In some such examples, the isolation structure includes a first hard mask disposed on the trench isolation material, a dielectric disposed on the first hard mask, and a second hard mask disposed on the dielectric.

Integrated circuits with capacitors

A semiconductor device includes a substrate having a first conductivity type, a first well formed in the substrate and having a second conductivity type, a first diffusion region formed in the first well and having the first conductivity type, a first interlayer dielectric layer disposed over the first well and the first diffusion region, and a resistor wire formed of a conductive material and embedded in the first interlayer dielectric layer. The resistor wire overlaps the first diffusion region and at least partially overlaps the first well in plan view.

Semiconductor device and a method of fabricating the same

A method of forming a semiconductor structure includes forming a semiconductor fin over a substrate, forming a dummy gate stack over the semiconductor fin, depositing a dielectric layer over the dummy gate stack, and selectively etching the dielectric layer, such that a top portion and a bottom portion of the dielectric layer form a step profile. The method further includes removing portions of the dielectric layer to form a gate spacer and subsequently forming a source/drain feature in the semiconductor fin adjacent to the gate spacer.

Gate spacers and methods of forming the same in semiconductor devices

A structure and a formation method of a semiconductor device are provided. The method includes forming a first semiconductor fin and a second semiconductor fin over a semiconductor substrate. The second semiconductor fin is wider than the first semiconductor fin. The method also includes forming a gate stack over the semiconductor substrate, and the gate stack extends across the first semiconductor fin and the second semiconductor fin. The method further includes forming a first source/drain structure on the first semiconductor fin, and the first source/drain structure is p-type doped. In addition, the method includes forming a second source/drain structure on the second semiconductor fin, and the second source/drain structure is n-type doped.

Structure and formation method of semiconductor device with fin structures

The present disclosure provides a method that includes receiving a semiconductor substrate that includes an integrated circuit (IC) cell and a well tap cell surrounding the IC cell; forming first fin active regions in the well tap cell and second fin active regions in the IC cell; forming a hard mask within the well tap cell, wherein the hard mask includes openings that define first source/drain (S/D) regions on the first fin active region of the well tap cell; forming gate stacks on the second fin active regions within the IC cell and absent from the well tap cell, wherein the gate stacks define second S/D regions on the second fin active regions; epitaxially growing first S/D features in the first S/D regions using the hard mask to constrain the epitaxially growing; and forming contacts landing on the first S/D features within the well tap cell.

Integrated circuit structure with non-gated well tap cell

A structure includes a fin on a substrate; first and second gate stacks over the fin and including first and second gate dielectric layers and first and second gate electrodes respectively; and a dielectric gate over the fin and between the first and second gate stacks. The dielectric gate includes a dielectric material layer on a third gate dielectric layer. In a cross-sectional view cut along a direction parallel to a lengthwise direction of the fin and offset from the fin, the first gate dielectric layer forms a first U shape, the third gate dielectric layer forms a second U shape, a portion of the first gate electrode is disposed within the first U shape, a portion of the dielectric material layer is disposed within the second U shape, and a portion of an interlayer dielectric layer is disposed laterally between the first and the second U shapes.

Gate structure and method with dielectric gates and gate-cut features

A first and a second gate structure each extend in a first direction. A first and a second conductive contact extend in the first direction and are separated from the first and second gate structures in a second direction. A first isolation structure extends in the second direction and separates the first gate structure from the second gate structure. A second isolation structure extends in the second direction and separates the first conductive contact from the second conductive contact. The first gate structure is electrically coupled to a first electrical node. The second gate structure is electrically coupled to a second electrical node different from the first electrical node. The first conductive contact is electrically coupled to the second electrical node. The second conductive contact is electrically coupled to the first electrical node.

High density capacitor implemented using FinFET

The first type of semiconductor device includes a first fin structure extending in a first direction, a first gate, and a first slot contact disposed over the first fin structure. The first gate extends in a second direction and has a first gate dimension measured in the first direction. The first slot contact has a first slot contact dimension measured in the first direction. A second type of semiconductor device includes: a second fin structure extending in a third direction, a second gate, and a second slot contact disposed over the second fin structure. The second gate extends in a fourth direction and has a second gate dimension measured in the third direction. The second slot contact has a second slot contact dimension measured in the third direction. The second slot contact dimension is greater than the second gate dimension and greater than the first slot contact dimension.

Reconfiguring layout and sizing for transistor components to simultaneously optimize logic devices and non-logic devices

A structure and formation method of a semiconductor device is provided. The method includes forming a first, a second, a third, and a fourth fin structures over a substrate. The method also includes forming a first spacer layer over sidewalls of the first and the second fin structures. The method further includes forming a second spacer layer over the first spacer layer and sidewalls of the third and the fourth fin structures. In addition, the method includes forming a first blocking fin between the first and the second fin structures. The first blocking fin is separated from the first fin structure by portions of the first spacer layer and the second spacer layer. The method includes forming a second blocking fin between the third and the fourth fin structures. The second blocking fin is separated from the third fin structure by a portion of the second spacer layer.

A semiconductor device includes a substrate; an I/O device over the substrate; and a core device over the substrate. The I/O device includes a first gate structure having an interfacial layer; a first high-k dielectric stack over the interfacial layer; and a conductive layer over and in physical contact with the first high-k dielectric stack. The core device includes a second gate structure having the interfacial layer; a second high-k dielectric stack over the interfacial layer; and the conductive layer over and in physical contact with the second high-k dielectric stack. The first high-k dielectric stack includes the second high-k dielectric stack and a third dielectric layer.

A semiconductor structure includes a fin active region extruded from a semiconductor substrate; and a gate stack disposed on the fin active region. The gate stack includes a gate dielectric layer and a gate electrode disposed on the gate dielectric layer. The gate dielectric layer includes a first dielectric material. The semiconductor structure further includes a dielectric gate of a second dielectric material disposed on the fin active region. The gate dielectric layer extends from a sidewall of the gate electrode to a sidewall of the dielectric gate. The second dielectric material is different from the first dielectric material in composition.

Gate structure and method

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Hsinchu, Taiwan

Chih-Yung Lin