Taiwan Semiconductor Manufacturing Comp. Ltd.

Chih-Yu Hsu

Jian-Hao Chen

Kuo-Feng Yu

Chia-Wei Chen

Chih-Sheng Chang

Da-Yuan Lee

Chien-Hao Chen

Yi-Tang Lin

Chung-Chiang Wu

Hsien-Ming Lee

Chia-Ching Lee

Hung-Chin Chung

Shih-Hang Chiu

Hsin-Han Tsai

Tsung-Ta Tang

Chi On Chui

Clement Hsingjen Wann

Chun Hsiung Tsai

Xiong-Fei Yu

Chi-Yuan Shih

Jyh-Cherng Sheu

Chia-Wei Hsu

Kuei-Lun Lin

Wei-Chun Tsai

Yen-Ming Chen

Feng-Cheng Yang

Shih-Hao Lin

Hui-Chi Chen

Shan-Mei Liao

Hoong Shing Wong

Cheng Hong Yang

A method includes forming a first gate dielectric and a second gate dielectric over a first semiconductor region and a second semiconductor region, respectively, depositing a lanthanum-containing layer including a first portion and a second portion overlapping the first gate dielectric and the second gate dielectric, respectively, and depositing a hard mask including a first portion and a second portion overlapping the first portion and the second portion of the lanthanum-containing layer, respectively. The hard mask is free from both of titanium and tantalum. The method further includes forming a patterned etching mask to cover the first portion of the hard mask, with the second portion of the hard mask being exposed, removing the second portion of the hard mask and the second portion of the lanthanum-containing layer, and performing an anneal to drive lanthanum in the first portion of the lanthanum-containing layer into the first gate dielectric.

Methods for doping high-K metal gates for tuning threshold voltages

In an embodiment, a method includes: depositing a gate dielectric layer on a first fin and a second fin, the first fin and the second fin extending away from a substrate in a first direction, a distance between the first fin and the second fin decreasing along the first direction; depositing a sacrificial layer on the gate dielectric layer by exposing the gate dielectric layer to a self-limiting source precursor and a self-reacting source precursor, the self-limiting source precursor reacting to form an initial layer of a material of the sacrificial layer, the self-reacting source precursor reacting to form a main layer of the material of the sacrificial layer; annealing the gate dielectric layer while the sacrificial layer covers the gate dielectric layer; after annealing the gate dielectric layer, removing the sacrificial layer; and after removing the sacrificial layer, forming a gate electrode layer on the gate dielectric layer.

Semiconductor device and method

A dummy gate electrode and a dummy gate dielectric are removed to form a recess between adjacent gate spacers. A gate dielectric is deposited in the recess, and a barrier layer is deposited over the gate dielectric. A first work function layer is deposited over the barrier layer. A first anti-reaction layer is formed over the first work function layer, the first anti-reaction layer reducing oxidation of the first work function layer. A fill material is deposited over the first anti-reaction layer.

Semiconductor device and method of manufacture

Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.

Post gate dielectric processing for semiconductor device fabrication

A first Fin Field-Effect Transistor (FinFET) and a second FinFET are adjacent to each other. Each of the first FinFET and the second FinFET includes a semiconductor fin, a gate dielectric on sidewalls and a top surface of the semiconductor fin, and a gate electrode over the gate dielectric. The semiconductor fin of the first FinFET and the semiconductor fin of the second FinFET are aligned to a straight line. An isolation region is aligned to the straight line, wherein the isolation region includes a portion at a same level as the semiconductor fins of the first FinFET and the second FinFET. A continuous straight semiconductor strip is overlapped by the semiconductor fins of the first FinFET and the second FinFET. A Shallow Trench Isolation (STI) region is on a side of, and contacts, the semiconductor strip. The isolation region and the first STI region form a distinguishable interface.

Forming STI regions to separate semiconductor Fins

Methods for doping high-k metal gates for tuning threshold voltages

Methods for forming STI regions in integrated circuits

An embodiment fin field-effect transistor (FinFET) includes an inner fin, and outer fin spaced apart from the inner fin by a shallow trench isolation (STI) region, an isolation fin spaced apart from the outer fin by the STI region, the isolation fin including a body portion, an isolation oxide, and an etch stop layer, the etch stop layer interposed between the body portion and the isolation oxide and between the STI region and the isolation oxide, and a gate formed over the inner fin, the outer fin, and the isolation fin.

Eliminating fin mismatch using isolation last

Growing community of inventors

Xinfeng, China

Chih-Yu Hsu