Taiwan Semiconductor Manufacturing Comp. Ltd.

Silicon Integrated Systems Corporation

Industrial Technology Research Institute

Mediatek Corporation

National Yang Ming Chiao Tung University

U-pixel Technologies Inc.

Chih-Yu Chang

Sai-Hooi Yeong

Bo-Feng Young

Yu-Ming Lin

Chi On Chui

Chun-Yen Peng

Chih-Hao Wang

Chun-Chieh Lu

Te-Yang Lai

Han-Jong Chia

Meng-Han Lin

Mauricio Manfrini

Hung Wei Wu

Chung-Te Lin

Zi-Wei Fang

Hsiang-Pi Chang

Sheng-Chih Lai

Chi-On Chui

Chiung-Fu Chen

Hung-Wei Wu

Kuan-Lun Cheng

Ching-Wei Tsai

Ziwei Fang

Chao-I Wu

Huang-Lin Chao

Cheng-Ming Lin

Chenchen Jacob Wang

Chi-Hsing Hsu

Ya-Yun Cheng

Hung-Wei Li

Hung Wei Li

Georgios Vallianitis

Marcus Johannes Hendricus Van Dal

Han-Ting Tsai

Ken-Ichi Goto

Yen-Chieh Huang

Chia-Ta Yu

Ying-Tsung Chen

William Weilun Hong

Hsin-Fei Meng

Sheng-Fu Horng

Che-Hao Tu

Jih-Ming Hsu

Sai-hooi Yeong

Yu-Chiang Chao

Min-Kun Dai

Oscal Tzyh-Chiang Chen

Wei-Zheng Lu

Yu-Chien Chiu

Chun-An Tu

Tsan-Hwi Chen

Che-Ming Hsu

Fu-Chiang Jan

Yu-Chieh Chen

Yen-Lin Lee

Shao-Sheng Yang

Wen-Ling Lu

Chih-Chung Cheng

Yu-Fan Chang

Yen-Hsiang Li

Hsin-Hao Chen

Chien-Chou Cheng

Mei-Peng Liou

Qian-Wei Lin

Hsiao-Tso Su

Chiung-Wen Chang

Wen-Yen Huang

Ying-Jyh Yeh

Ming-Jen Tai

Yu-chien Chiu

Chung-Min Kao

The present disclosure provides a semiconductor device and a method for fabricating a semiconductor device. The semiconductor device includes a substrate, a metal gate layer over the substrate, a channel between a source region and a drain region in the substrate, and a ferroelectric layer, at least a portion of the ferroelectric layer is between the metal gate layer and the substrate, wherein the ferroelectric layer includes hafnium oxide-based material, the hafnium oxide-based material includes a first portion of hafnium oxide with orthorhombic phase, a second portion of hafnium oxide with monoclinic phase, and a third portion of the hafnium oxide with tetragonal phase, wherein a first volume of the first portion is greater than a second volume of the second portion, and the second volume of the second portion is greater than a third volume the third portion.

Semiconductor structure and manufacturing method for the semiconductor structure

A method for fabricating a three-dimensional memories is provided. A stack with multiple levels is formed, and each of the levels includes an isolation layer, a metal layer, and a semiconductor layer between the isolation layer and the metal layer. A first trench and a plurality of second trenches are formed along each parallel line in the stack of the levels. The isolation layers and the metal layers in the parallel lines are removed through the first trench and the second trenches, so as to expose the semiconductor layers in the parallel line. A plurality of memory cells are formed in the parallel lines of the levels. In each of the levels, each of the memory cells includes a transistor and a channel of the transistor is formed by the semiconductor layer in the parallel line.

Method for fabricating three-dimensional memory

Various embodiments of the present disclosure provide a memory device and methods of forming the same. In one embodiment, a memory device is provided. The memory device includes a gate electrode disposed in an insulating material layer, a ferroelectric dielectric layer disposed over the gate electrode, a metal oxide semiconductor layer disposed over the ferroelectric dielectric layer, a source feature disposed over the metal oxide semiconductor layer, wherein the source feature has a first dimension, and a source extension. The source extension includes a first portion disposed over the source feature, wherein the first portion has a second dimension that is greater than the first dimension. The source extension also includes a second portion extending downwardly from the first portion to an elevation that is lower than a top surface of the source feature.

Ferroelectric device and methods of forming the same

A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device comprises a gate, a ferroelectric layer disposed on the gate; a first channel layer disposed on the ferroelectric layer, a second channel layer disposed on the ferroelectric layer, and source and drain regions disposed on the first channel layer. The first channel layer includes a first thickness and the second channel layer includes a second thickness. A ratio of the first thickness and the second thickness is less than ⅗.

Source/drain engineering for ferroelectric field effect transistors

A 3D memory array in which epitaxial source/drain regions which are horizontally merged and vertically unmerged are used as source lines and bit lines and methods of forming the same are disclosed. In an embodiment, a memory array includes a first channel region over a semiconductor substrate; a first epitaxial region electrically coupled to the first channel region; a second epitaxial region directly over the first epitaxial region in a direction perpendicular to a major surface of the semiconductor substrate; a dielectric material between the first epitaxial region and the second epitaxial region, the second epitaxial region being isolated from the first epitaxial region by the dielectric material; a gate dielectric surrounding the first channel region; and a gate electrode surrounding the gate dielectric.

Memory array including epitaxial source lines and bit lines

Embodiments include structures and methods for fabricating an MFM capacitor having a plurality of metal contacts. An embodiment may include a first metal strip, disposed on a substrate and extending in a first direction, a ferroelectric blanket layer, disposed on the first metal strip, a second metal strip, disposed on the ferroelectric blanket layer and extending in a second direction different from the first direction, and a plurality of metal contacts disposed between the first metal strip and the second metal strip and located within an intersection region of the first metal strip and the second metal strip.

Ferroelectric MFM capacitor array and methods of making the same

A semiconductor structure and manufacturing method thereof are provided. The semiconductor structure includes a substrate and a metallization structure over the substrate. The metallization structure includes a MIM structure, a first contact and a second contact. The MIM structure includes a bottom electrode layer, a dielectric layer on the bottom electrode layer, a ferroelectric layer on the dielectric layer, and a top electrode layer on the ferroelectric layer. The ferroelectric layer is substantially made of lead zirconate titanate (PZT), BaTiO(BTO), or barium strontium titanate (BST), and a thickness of the ferroelectric layer is greater than a thickness of the dielectric layer.

Metal insulator metal (MIM) structure and manufacturing method thereof

The present disclosure provides a semiconductor device and a method for forming a semiconductor device. The semiconductor device includes a substrate, and a first gate dielectric stack over the substrate, wherein the first gate dielectric stack includes a first ferroelectric layer, and a first dielectric layer coupled to the first ferroelectric layer, wherein the first ferroelectric layer includes a first portion made of a ferroelectric material in orthorhombic phase, a second portion made of the ferroelectric material in monoclinic phase, and a third portion made of the ferroelectric material in tetragonal phase, wherein a total volume of the second portion is greater than a total volume of the first portion, and the total volume of the first portion is greater than a total volume of the third portion.

Semiconductor device and manufacturing method for the semiconductor device

A memory cell includes patterning a first trench extending through a first conductive line, depositing a memory film along sidewalls and a bottom surface of the first trench, depositing a channel layer over the memory film, the channel layer extending along the sidewalls and the bottom surface of the first trench, depositing a first dielectric layer over and contacting the channel layer to fill the first trench, patterning a first opening, wherein patterning the first opening comprises etching the first dielectric layer, depositing a gate dielectric layer in the first opening, and depositing a gate electrode over the gate dielectric layer and in the first opening, the gate electrode being surrounded by the gate dielectric layer.

Three-dimensional memory device and method

A memory cell includes a transistor including a memory film extending along a word line; a channel layer extending along the memory film, wherein the memory film is between the channel layer and the word line; a source line extending along the memory film, wherein the memory film is between the source line and the word line; a first contact layer on the source line, wherein the first contact layer contacts the channel layer and the memory film; a bit line extending along the memory film, wherein the memory film is between the bit line and the word line; a second contact layer on the bit line, wherein the second contact layer contacts the channel layer and the memory film; and an isolation region between the source line and the bit line.

Memory array contact structures

The present disclosure, in some embodiments, relates to a ferroelectric memory device. The ferroelectric memory device includes a multi-layer stack disposed on a substrate. The multi-layer stack has a plurality of conductive layers and a plurality of dielectric layers stacked alternately. A channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers. A ferroelectric layer is disposed between the channel layer and both of the plurality of conductive layers and the plurality of dielectric layers. A plurality of oxygen scavenging layers are disposed along sidewalls of the plurality of conductive layer. The plurality of oxygen scavenging layers laterally separate the ferroelectric layer from the plurality of conductive layers.

Ferroelectric memory device and method of forming the same

The present disclosure relates a ferroelectric field-effect transistor (FeFET) device. The FeFET device includes a ferroelectric structure having a first side and a second side. A gate structure is disposed along the first side of the ferroelectric structure, and an oxide semiconductor is disposed along the second side of the ferroelectric structure. The oxide semiconductor has a first semiconductor type. A source region and a drain region are disposed on the oxide semiconductor. The gate structure is laterally between the source region and the drain region. A polarization enhancement structure is arranged on the oxide semiconductor between the source region and the drain region. The polarization enhancement structure includes a semiconductor material or an oxide semiconductor material having a second semiconductor type that is different than the first semiconductor type.

Polarization enhancement structure for enlarging memory window

Various embodiments of the present disclosure are directed towards a method of forming a ferroelectric memory device. In the method, a pair of source/drain regions is formed in a substrate. A gate dielectric and a gate electrode are formed over the substrate and between the pair of source/drain regions. A polarization switching structure is formed directly on a top surface of the gate electrode. By arranging the polarization switching structure directly on the gate electrode, smaller pad size can be realized, and more flexible area ratio tuning can be achieved compared to arranging the polarization switching structure under the gate electrode with the aligned sidewall and same lateral dimensions. In addition, since the process of forming gate electrode can endure higher annealing temperatures, such that quality of the ferroelectric structure is better controlled.

Embedded ferroelectric FinFET memory device

A semiconductor chip including a semiconductor substrate, an interconnect structure and a memory cell array is provided. The semiconductor substrate includes a logic circuit. The interconnect structure is disposed on the semiconductor substrate and electrically connected to the logic circuit, and the interconnect structure includes stacked interlayer dielectric layers and interconnect wirings embedded in the stacked interlayer dielectric layers. The memory cell array is embedded in the stacked interlayer dielectric layers. The memory cell array includes driving transistors and memory devices, and the memory devices are electrically connected the driving transistors through the interconnect wirings.

Semiconductor chip

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Taipei, Taiwan

Chih-Yu Chang