United Microelectronics Corp.

Chih-Sen Huang

Ching-Wen Hung

Yi-Wei Chen

Jia-Rong Wu

Yi-Hui Lee

Po-Chao Tsao

Ching-Ling Lin

Chia-Lin Lu

Ying-Cheng Liu

Feng-Yi Chang

Chun-Lung Chen

Shih-Fang Tzou

Chieh-Te Chen

Kun-Yuan Liao

Tsung-Hung Chang

En-Chiuan Liou

Chien-Ting Lin

Yi-Kuan Wu

Chia-Wei Huang

Wei-Hao Huang

Chun-Hsien Lin

Yung-Feng Cheng

Yu-Cheng Tung

Li-Wei Feng

Shih-Hung Tsai

Jyh-Shyang Jenq

Chih-Wei Yang

Chao-Hung Lin

Shu-Ru Wang

Ssu-I Fu

Chun-Hsien Huang

Chih-Kai Hsu

Yu-Tse Kuo

Ming-Jui Chen

Hsiao-Pang Chou

Yi-Ching Wu

Li-Ping Huang

Tan-Ya Yin

Jun-Jie Wang

Hsiang-Hung Peng

Wei-Cyuan Lo

Shi-Xiong Lin

Yu-Tsung Lai

Hsin-Fu Huang

Chia-Chang Hsu

Shih-Fang Hong

Yi-Wen Chen

Hsuan-Hsu Chen

Ling-Chun Chou

I-Chang Wang

Chia-Jui Liang

Chia Chang Hsu

Yu-Lin Wang

Ching-Pin Hsu

Shu-Min Huang

Chan-Yuan Hu

A semiconductor structure is disclosed. The semiconductor structure includes a substrate, and an interlayer dielectric disposed on the substrate which has agate structure therein. The gate structure further includes a gate electrode with a protruding portion, and a gate dielectric layer disposed between the gate electrode and the substrate. A spacer is disposed between the interlayer dielectric and the gate electrode. An insulating cap layer is disposed atop the gate electrode and encompasses the top and the sidewall of the protruding portion.

Semiconductor structure

A method for filling patterns includes the steps of: providing a substrate having a cell region defined thereon; forming main patterns on the substrate and within the cell region; and filling first dummy patterns adjacent to the main patterns. Preferably, each of the first dummy patterns comprises a first length along X-direction between 2 &#x3bc;m to 5 &#x3bc;m and a second length along Y-direction between 3 &#x3bc;m to 5 &#x3bc;m.

Method for filling patterns

A method for fabricating semiconductor device is disclosed. A substrate having a first transistor on a first region, a second transistor on a second region, a trench isolation region, a resistor-forming region is provided. A first ILD layer covers the first region, the second region, and the resistor-forming region. A resistor material layer and a capping layer are formed over the first region, the second region, and the resistor-forming region. The capping layer and the resistor material layer are patterned to form a first hard mask pattern above the first and second regions and a second hard mask pattern above the resistor-forming region. The resistor material layer is isotropically etched. A second ILD layer is formed over the substrate. The second ILD layer and the first ILD layer are patterned with a mask and the first hard mask pattern to form a contact opening.

Semiconductor device and fabrication method thereof

A method for fabricating semiconductor device includes the steps of: providing a substrate; forming a first gate structure on the substrate, a first spacer around the first gate structure, and an interlayer dielectric (ILD) layer around the first spacer; performing a first etching process to remove part of the ILD layer for forming a recess; performing a second etching process to remove part of the first spacer for expanding the recess; and forming a contact plug in the recess.

Method for fabricating semiconductor device

The present invention provides a method of forming a semiconductor structure including a substrate, a transistor, a first ILD layer, a second ILD layer, a first contact plug, second contact plug and a third contact plug. The transistor is disposed on the substrate and includes a gate and a source/drain region. The first ILD layer is disposed on the transistor. The first contact plug is disposed in the first ILD layer and a top surface of the first contact plug is higher than a top surface of the gate. The second ILD layer is disposed on the first ILD layer. The second contact plug is disposed in the second ILD layer and electrically connected to the first contact plug. The third contact plug is disposed in the first ILD layer and the second ILD layer and electrically connected to the gate.

Method of making semiconductor structure having contact plug

Semiconductor devices and method of manufacturing such semiconductor devices are provided for improved FinFET memory cells to avoid electric short often happened between metal contacts of a bit cell, where the meal contacts are positioned next to a dummy gate of a neighboring dummy edge cell. In one embodiment, during the patterning of a gate layer on a substrate surface, an improved gate slot pattern is used to extend the lengths of one or more gate slots adjacent bit lines so as to pattern and sectionalize a dummy gate line disposed next to metal contacts of an active memory cell. In another embodiment, during the patterning of gate lines, the distances between one or more dummy gates lines disposed adjacent an active memory cell are adjusted such that their locations within dummy edge cells are shifted in position to be away from metal contacts of the active memory cell.

Dummy gate technology to avoid shorting circuit

A method for fabricating semiconductor device includes the steps of: providing a substrate having at least a gate structure thereon and an interlayer dielectric (ILD) layer surrounding the gate structure, wherein the gate structure comprises a hard mask thereon; forming a dielectric layer on the gate structure and the ILD layer; removing part of the dielectric layer to expose the hard mask and the ILD layer; and performing a surface treatment to form a doped region in the hard mask and the ILD layer.

Method for fabricating a semiconductor device having gate structure with doped hard mask

A method for fabricating semiconductor device first includes providing a substrate and a shallow trench isolation (STI) in the substrate, in which the substrate includes a first metal gate and a second metal gate thereon, a first hard mask on the first metal gate and a second hard mask on the second metal gate, and a first interlayer dielectric (ILD) layer around the first metal gate and the second metal gate. Next, the first hard mask and the second hard mask as mask are utilized to remove part of the first ILD layer for forming a recess, and a patterned metal layer is formed in the recess and on the STI.

Method for fabricating semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer

A manufacturing method of a semiconductor structure includes the following steps. An epitaxial region is formed in a semiconductor substrate. A dielectric layer is formed on the epitaxial region, and a contact hole is formed in the dielectric layer. The contact hole exposes a part of the epitaxial region, and an oxide-containing layer is formed on the epitaxial region exposed by the contact hole. A contact structure is formed in the contact hole and on the oxide-containing layer. The oxide-containing layer is located between the contact structure and the epitaxial region. A semiconductor structure includes the semiconductor substrate, at least one epitaxial region, the contact structure, the oxide-containing layer, and a silicide layer. The contact structure is disposed on the epitaxial region. The oxide-containing layer is disposed between the epitaxial region and the contact structure. The silicide layer is disposed between the oxide-containing layer and the contact structure.

Semiconductor structure and manufacturing method thereof

A method for fabricating semiconductor device is disclosed. First, a substrate is provided, a first gate structure is formed on the substrate, a first spacer is formed around the first gate structure, and an interlayer dielectric (ILD) layer is formed around the first spacer. Next, a first etching process is performed to remove part of the ILD layer for forming a recess, a second etching process is performed to remove part of the first spacer for expanding the recess, and a contact plug is formed in the recess.

Semiconductor device and method for fabricating the same

A semiconductor device is disclosed. The semiconductor device includes: a substrate having a cell region defined thereon, in which the cell region includes a first edge and a second edge extending along a first direction; and a plurality of patterns on the substrate extending along the first direction, in which the patterns includes a plurality of first patterns and a plurality of second patterns, and one of the first patterns closest to the first edge and one of the second patterns closest to the second edge are different.

Semiconductor device and method for filling patterns

A method for fabricating semiconductor device is disclosed. First, a substrate is provided, in which the substrate includes a first metal gate and a second metal gate thereon, a first hard mask on the first metal gate and a second hard mask on the second metal gate, and a first interlayer dielectric (ILD) layer around the first metal gate and the second metal gate. Next, the first hard mask and the second hard mask are used as mask to remove part of the first ILD layer for forming a recess, and a patterned metal layer is formed in the recess, in which the top surface of the patterned metal layer is lower than the top surfaces of the first hard mask and the second hard mask.

A method for fabricating semiconductor device is disclosed. First, a first fin-shaped structure and a second fin-shaped structure are formed on a substrate, and a shallow trench isolation (STI) is formed around the first fin-shaped structure and the second fin-shaped structure, a patterned hard mask is formed on the STI. Next, part of the first fin-shaped structure and part of the second fin-shaped structure adjacent to two sides of the patterned hard mask are removed for forming a first recess and a second recess, and a dielectric material is formed into the first recess and the second recess.

A semiconductor device and a method of fabricating the same are provided. The semiconductor device includes a substrate, a plurality of gates and a plurality of plugs. The gates are disposed on the substrate and extend in a first direction. The gates include a first gate and a second gate. The first gate includes a first protruding portion extending in a second direction. The plugs are disposed parallel to one another on the substrate. The plugs include a first plug and a second plug. The first plug and the second plug cover the first gate and the second gate respectively. A central axis of the first plug is shifted from a central axis of the first gate toward the second direction, and a central axis of the second plug is shifted from a central axis of the second gate toward the second direction.

Semiconductor device and method of fabricating the same

Growing community of inventors

Tainan, Taiwan

Chih-Sen Huang