United Microelectronics Corp.

Chih-Mou Lin

Ming-Hua Tsai

Yu-Hsiang Hung

Yu-Hsiang Lin

Jung Han

Ming-Chi Li

Tzu-Lang Shih

Chin-Chia Kuo

Wei-Hsuan Chang

Chiao-Yu Li

Chun-Ning Wu

Su-Hua Tsai

Pai-Tsang Liu

A semiconductor device includes a semiconductor substrate, a first gate oxide layer, and a first source/drain doped region. The first gate oxide layer is disposed on the semiconductor substrate, and the first gate oxide layer includes a main portion and an edge portion having a sloping sidewall. The first source/drain doped region is disposed in the semiconductor substrate and located adjacent to the edge portion of the first gate oxide layer. The first source/drain doped region includes a first portion and a second portion. The first portion is disposed under the edge portion of the first gate oxide layer in a vertical direction, and the second portion is connected with the first portion.

Manufacturing method of semiconductor device including gate oxide layer

Semiconductor device including gate oxide layer

Semiconductor device including gate oxide layer and manufacturing method thereof

A high-voltage device includes a semiconductor substrate, a source diffusion region, a drain diffusion region, a channel diffusion region and a gate electrode. The source diffusion region and the drain diffusion region with a first conductive type are disposed in the semiconductor substrate. The channel diffusion region is disposed in the semiconductor substrate and between the source diffusion region and the drain diffusion region. The gate dielectric layer is disposed on the channel diffusion region and having a first modified portion with a second conductive type extending inwards from a first edge of the gate dielectric layer. The gate electrode is disposed on the gate electric layer, wherein the first modified portion, the gate electrode and the channel diffusion region at least partially overlap with each other.

High-voltage device and method for fabricating the same

Growing community of inventors

Tainan, Taiwan

Chih-Mou Lin