Taiwan Semiconductor Manufacturing Comp. Ltd.

Chih-Ming Hong

Clark Lee

Yi-Chuan Lo

Hsun-Peng Lin

An optical test method is provided. The optical test method includes emitting light through a gap between two substrates of a tested optical element disposed on a holder to generate a plurality of light beams. The optical test method further includes driving the holder with the tested optical element to move to N positions. The optical test method also includes receiving one of the light beams from the tested optical element in the N positions to generate N first intensity signals. In addition, the optical test method includes determining the size of the gap of the tested optical element according to the N first intensity signals and reference data.

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Hsinchu, Taiwan

Chih-Ming Hong